Inventor · disambiguated record

Kazyuki Hayashi

Also filed as: HAYASHI KAZYUKI

1 granted patent·12 citations·filing 2009–2009

35Inventor score

Technology areasG03F

Files withHAYASHI KAZYUKI1

Top patents by PatentIndex Score

1 record

0183US8088538B2Reflective mask blank for EUV lithographyHAYASHI KAZYUKI·Filed 2009·Granted Jan 3, 2012·12 cites·16 claims

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