Inventor · disambiguated record
Glenn W. Gale
Also filed as: GALE GLENN · GALE GLENN W · GALE GLENN WALTON
17 granted patents·1 pending application·284 citations·filing 1997–2010
94Inventor score
Technology areasH10P
Top patents by PatentIndex Score
18 records- 0187US6276370B1Sonic cleaning with an interference signalIBM·Filed 1999·Granted Aug 21, 2001·90 cites·48 claims
- 0276US8440573B2Method and apparatus for pattern collapse free wet processing of semiconductor devicesMIKHAYLICHENKO KATRINA·Filed 2010·Granted May 14, 2013·4 cites·20 claims
- 0376US5962384AMethod for cleaning semiconductor devicesIBM·Filed 1997·Granted Oct 5, 1999·40 cites·9 claims
- 0473US6783599B2Method of cleaning contaminants from the surface of a substrateIBM·Filed 2001·Granted Aug 31, 2004·16 cites·32 claims
- 0571US6354309B1Process for treating a semiconductor substrateIBM·Filed 2000·Granted Mar 12, 2002·13 cites·14 claims
- 0667US8043521B2Processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Oct 25, 2011·2 cites·7 claims
- 0767US7250374B2System and method for processing a substrate using supercritical carbon dioxide processingTOKYO ELECTRON LTD·Filed 2004·Granted Jul 31, 2007·11 cites·24 claims
- 0861US6254796B1Selective etching of silicateIBM·Filed 1998·Granted Jul 3, 2001·24 cites·20 claims
- 0959US6117796ARemoval of silicon oxideIBM·Filed 1998·Granted Sep 12, 2000·23 cites·17 claims
- 1058US6565666B1Capillary dry process and apparatusIBM·Filed 2000·Granted May 20, 2003·6 cites·11 claims
- 1156US6191085B1Method for cleaning semiconductor devicesIBM·Filed 1999·Granted Feb 20, 2001·17 cites·10 claims
- 1247US6356653B2Method and apparatus for combined particle location and removalIBM·Filed 1998·Granted Mar 12, 2002·16 cites·34 claims
- 1347US2006088959A1Processing method and processing apparatusGALE GLENN·Filed 2005·Application pending·0 cites
- 1444US7897498B2Method for manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 2005·Granted Mar 1, 2011·0 cites·9 claims
- 1540US6173720B1Process for treating a semiconductor substrateIBM·Filed 1998·Granted Jan 16, 2001·7 cites·19 claims
- 1639US6514355B1Method and apparatus for recovery of semiconductor wafers from a chemical tankIBM·Filed 1999·Granted Feb 4, 2003·11 cites·34 claims
- 1738US6508014B2Method of drying substratesIBM·Filed 2001·Granted Jan 21, 2003·0 cites·10 claims
- 1834US5966631AForced plug processing for high aspect ratio structuresIBM·Filed 1997·Granted Oct 12, 1999·4 cites·19 claims
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