Inventor · disambiguated record
Tobias Pflanz
Also filed as: PFLANZ TOBIAS
3 granted patents·63 citations·filing 2001–2003
69Inventor score
Top patents by PatentIndex Score
3 records- 0192US6618421B2High repetition rate gas discharge laser with precise pulse timing controlCYMER INC·Filed 2001·Granted Sep 9, 2003·59 cites·10 claims
- 0245US7149234B2High repetition rate gas discharge laser with precise pulse timing controlCYMER INC·Filed 2003·Granted Dec 12, 2006·1 cites·16 claims
- 0345US6798814B2Gas discharge laser, method of operating a gas discharge laser, and use of a sintered filterTUILASER AG·Filed 2002·Granted Sep 28, 2004·3 cites·37 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →