Inventor · disambiguated record

Jennan Yu

Also filed as: YU JENNAN

2 granted patents·60 citations·filing 2001–2003

61Inventor score

Technology areasG03F H03K

Files withCYMER INC2

Top patents by PatentIndex Score

2 records

0192US6618421B2High repetition rate gas discharge laser with precise pulse timing controlCYMER INC·Filed 2001·Granted Sep 9, 2003·59 cites·10 claims
0245US7149234B2High repetition rate gas discharge laser with precise pulse timing controlCYMER INC·Filed 2003·Granted Dec 12, 2006·1 cites·16 claims

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