Inventor · disambiguated record
Robert R. Wilbarg
Also filed as: WILBARG ROBERT R
5 granted patents·151 citations·filing 1977–1992
84Inventor score
Files withIBM5
Top patents by PatentIndex Score
5 records- 0178US4115120AMethod of forming thin film patterns by differential pre-baking of resistIBM·Filed 1977·Granted Sep 19, 1978·41 cites·6 claims
- 0273US5296408AFabrication method for vacuum microelectronic devicesIBM·Filed 1992·Granted Mar 22, 1994·53 cites·5 claims
- 0366US5043586APlanarized, reusable calibration gridsIBM·Filed 1990·Granted Aug 27, 1991·19 cites·13 claims
- 0465US4229233AMethod for fabricating non-reflective semiconductor surfaces by anisotropic reactive ion etchingIBM·Filed 1979·Granted Oct 21, 1980·22 cites·6 claims
- 0563US5169488AMethod of forming planarized, reusable calibration gridsIBM·Filed 1991·Granted Dec 8, 1992·16 cites·18 claims
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