Inventor · disambiguated record
Katja Steffen
Also filed as: STEFFEN KATJA
4 granted patents·18 citations·filing 2003–2010
71Inventor score
Top patents by PatentIndex Score
4 records- 0183US8138038B2Superior fill conditions in a replacement gate approach by performing a polishing process based on a sacrificial fill materialHEINRICH JENS·Filed 2010·Granted Mar 20, 2012·8 cites·22 claims
- 0263US8338306B2Forming semiconductor resistors in a semiconductor device comprising metal gates by increasing etch resistivity of the resistorsHEINRICH JENS·Filed 2010·Granted Dec 25, 2012·2 cites·16 claims
- 0354US8585465B2Planarization of a material system in a semiconductor device by using a non-selective in situ prepared slurryGROSCHOPF JOHANNES·Filed 2010·Granted Nov 19, 2013·2 cites·13 claims
- 0453US6867442B2Surface-functionalized inorganic semiconductor particles as electrical semiconductors for microelectronics applicationsINFINEON TECHNOLOGIES AG·Filed 2003·Granted Mar 15, 2005·6 cites·14 claims
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