Inventor · disambiguated record
Chin-Yi Liu
Also filed as: LIU CHIN-YI
3 granted patents·1 pending application·55 citations·filing 2015–2022
70Inventor score
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0192US10923379B2Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structureLAM RES CORP·Filed 2017·Granted Feb 16, 2021·41 cites·15 claims
- 0292US10109460B2Universal non-invasive chamber impedance measurement system and associated methodsLAM RES CORP·Filed 2016·Granted Oct 23, 2018·12 cites·19 claims
- 0372US9790582B2Long lifetime thermal spray coating for etching or deposition chamber applicationLAM RES CORP·Filed 2015·Granted Oct 17, 2017·2 cites·16 claims
- 0451US2024162010A1Adjustable dielectric constant ceramic windowLAM RES CORP·Filed 2022·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →