Inventor · disambiguated record
Willi Heintel
Also filed as: HEINTEL WILLI
9 granted patents·2 pending applications·38 citations·filing 2003–2016
85Inventor score
Top patents by PatentIndex Score
11 records- 0184US9658542B2Optical elementZEISS CARL SMT GMBH·Filed 2014·Granted May 23, 2017·4 cites·25 claims
- 0284US7760327B2Reflecting optical element with eccentric optical passagewayZEISS CARL SMT AG·Filed 2006·Granted Jul 20, 2010·8 cites·55 claims
- 0381US10663873B2Mirror arrangement for microlithographic projection exposure apparatus and related methodZEISS CARL SMT GMBH·Filed 2016·Granted May 26, 2020·2 cites·26 claims
- 0481US9134501B2Optical element unit and method of supporting an optical elementSCHAFFER DIRK·Filed 2007·Granted Sep 15, 2015·7 cites·42 claims
- 0568US7859641B2Optical element moduleZEISS CARL SMT AG·Filed 2008·Granted Dec 28, 2010·3 cites·79 claims
- 0665US8441747B2Optical module with minimized overrun of the optical elementHEINTEL WILLI·Filed 2007·Granted May 14, 2013·6 cites·15 claims
- 0758US7448763B2Optical subassembly and projection objective in semiconductor lithographyZEISS CARL SMT AG·Filed 2003·Granted Nov 11, 2008·7 cites·29 claims
- 0849US2016109679A1Optical Element Unit And Method Of Supporting An Optical ElementZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
- 0947US8305701B2Connecting arrangement for an optical deviceMETHE HEIKO·Filed 2009·Granted Nov 6, 2012·1 cites·20 claims
- 1043US2011063590A1Optical element moduleZEISS CARL SMT AG·Filed 2010·Application pending·0 cites
- 1141US10133183B2Optical componentZEISS CARL SMT GMBH·Filed 2016·Granted Nov 20, 2018·0 cites·19 claims
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