Inventor · disambiguated record
Hidekazu Kiyama
Also filed as: KIYAMA HIDEKAZU
4 granted patents·1 pending application·11 citations·filing 2012–2024
67Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0179US12077392B2Substrate transfer apparatus and substrate transfer methodTOKYO ELECTRON LTD·Filed 2021·Granted Sep 3, 2024·1 cites·6 claims
- 0279US8985929B2Substrate processing apparatus, substrate processing method and storage mediumENOKIDA SUGURU·Filed 2012·Granted Mar 24, 2015·7 cites·7 claims
- 0368US9082800B2Substrate treatment system, substrate transfer method and non-transitory computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Jul 14, 2015·2 cites·20 claims
- 0468US2024391706A1Substrate transfer apparatus and substrate transfer methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0560US11257701B2Substrate processing apparatus, substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2019·Granted Feb 22, 2022·1 cites·13 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →