Inventor · disambiguated record

Hidefumi Shibano

Also filed as: SHIBANO HIDEFUMI

1 granted patent·2 citations·filing 2001–2001

19Inventor score

Technology areasG03F

Files withNIKON CORP1

Top patents by PatentIndex Score

1 record

0144US6750951B2Optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2001·Granted Jun 15, 2004·2 cites·24 claims

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