Inventor · disambiguated record
Haldorai Yuvaraj
Also filed as: YUVARAJ HALDORAI
3 granted patents·22 citations·filing 2007–2011
70Inventor score
Technology areasH10P
Files withLEE HYO-SAN3
Top patents by PatentIndex Score
3 records- 0187US8790470B2Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methodsLEE HYO-SAN·Filed 2011·Granted Jul 29, 2014·8 cites·35 claims
- 0284US8084367B2Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methodsLEE HYO-SAN·Filed 2007·Granted Dec 27, 2011·9 cites·31 claims
- 0382US8585917B2Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methodsLEE HYO-SAN·Filed 2011·Granted Nov 19, 2013·5 cites·36 claims
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