Inventor · disambiguated record
Tom Ni
Also filed as: NI TOM
5 granted patents·492 citations·filing 1997–2008
83Inventor score
Top patents by PatentIndex Score
5 records- 0196US6042687AMethod and apparatus for improving etch and deposition uniformity in plasma semiconductor processingLAM RES CORP·Filed 1997·Granted Mar 28, 2000·185 cites·29 claims
- 0296US6013155AGas injection system for plasma processingLAM RES CORP·Filed 1997·Granted Jan 11, 2000·294 cites·29 claims
- 0377US8608851B2Plasma confinement apparatus, and method for confining a plasmaNI TOM·Filed 2006·Granted Dec 17, 2013·7 cites·11 claims
- 0457US7413988B1Method and apparatus for detecting planarization of metal films prior to clearingLAM RES CORP·Filed 2003·Granted Aug 19, 2008·6 cites·16 claims
- 0552US7690966B1Method and apparatus for detecting planarization of metal films prior to clearingLAM RES CORP·Filed 2008·Granted Apr 6, 2010·0 cites·5 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →