Inventor · disambiguated record
Katgenhalli Y. Ramanujam
Also filed as: RAMANUJAM KATGENHALLI Y
3 granted patents·32 citations·filing 2002–2008
66Inventor score
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0181US6896586B2Method and apparatus for heating polishing padLAM RES CORP·Filed 2002·Granted May 24, 2005·26 cites·16 claims
- 0257US7413988B1Method and apparatus for detecting planarization of metal films prior to clearingLAM RES CORP·Filed 2003·Granted Aug 19, 2008·6 cites·16 claims
- 0352US7690966B1Method and apparatus for detecting planarization of metal films prior to clearingLAM RES CORP·Filed 2008·Granted Apr 6, 2010·0 cites·5 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →