Inventor · disambiguated record
Bongseong Kim
Also filed as: KIM BONGSEONG
5 granted patents·1 pending application·67 citations·filing 2015–2025
76Inventor score
Top patents by PatentIndex Score
6 records- 0190US9490107B2Plasma apparatus and method of fabricating semiconductor device using the sameKIM MOOJIN·Filed 2015·Granted Nov 8, 2016·55 cites·22 claims
- 0288US9704690B2Plasma apparatus and method of operating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jul 11, 2017·10 cites·20 claims
- 0376US10971333B2Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Apr 6, 2021·2 cites·17 claims
- 0475US2025292996A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0564US12347646B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jul 1, 2025·0 cites·4 claims
- 0659US12327709B2Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jun 10, 2025·0 cites·20 claims
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