Inventor · disambiguated record
Scot Smith
Also filed as: SMITH SCOT · SMITH SCOT T
8 granted patents·3 pending applications·278 citations·filing 2002–2012
89Inventor score
Top patents by PatentIndex Score
11 records- 0196US6928093B2Long delay and high TIS pulse stretcherCYMER INC·Filed 2003·Granted Aug 9, 2005·81 cites·52 claims
- 0296US6693939B2Laser lithography light source with beam deliveryCYMER INC·Filed 2002·Granted Feb 17, 2004·115 cites·2 claims
- 0393US7567607B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2006·Granted Jul 28, 2009·14 cites·3 claims
- 0492US7369597B2Laser output light pulse stretcherCYMER INC·Filed 2004·Granted May 6, 2008·41 cites·65 claims
- 0582US7061961B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2005·Granted Jun 13, 2006·5 cites·20 claims
- 0677US7016388B2Laser lithography light source with beam deliveryCYMER INC·Filed 2003·Granted Mar 21, 2006·15 cites·28 claims
- 0762US8598559B2Systems and methods for beam splitting for imagingSMITH SCOT T·Filed 2010·Granted Dec 3, 2013·3 cites·22 claims
- 0860US7218661B2Line selected F2 two chamber laser systemCYMER INC·Filed 2004·Granted May 15, 2007·4 cites·77 claims
- 0951US2005259709A1Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrateCYMER INC·Filed 2005·Application pending·0 cites
- 1043US2012162657A1Coherency Reduction for Bandwidth MeasurementRAFAC ROBERT J·Filed 2012·Application pending·0 cites
- 1136US2005286599A1Method and apparatus for gas discharge laser output light coherency reductionRAFAC ROBERT J·Filed 2004·Application pending·0 cites
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