Inventor · disambiguated record
Richard C. Ujazdowski
Also filed as: UJAZDOWSKI RICHARD · UJAZDOWSKI RICHARD C · UJAZDOWSKI RICHARD CARL · WEBB R KYLE
45 granted patents·3 pending applications·2,181 citations·filing 1985–2019
99Inventor score
Top patents by PatentIndex Score
48 records- 0199US6567450B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted May 20, 2003·265 cites·52 claims
- 0298US6625191B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted Sep 23, 2003·236 cites·78 claims
- 0398US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 0498US5991324AReliable. modular, production quality narrow-band KRF excimer laserCYMER INC·Filed 1998·Granted Nov 23, 1999·196 cites·16 claims
- 0597US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 0697US6414979B2Gas discharge laser with blade-dielectric electrodeCYMER INC·Filed 2001·Granted Jul 2, 2002·173 cites·17 claims
- 0797US6317447B1Electric discharge laser with acoustic chirp correctionCYMER INC·Filed 2000·Granted Nov 13, 2001·108 cites·9 claims
- 0895US6904073B2High power deep ultraviolet laser with long life opticsCYMER INC·Filed 2003·Granted Jun 7, 2005·78 cites·87 claims
- 0993US7567607B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2006·Granted Jul 28, 2009·14 cites·3 claims
- 1091US7856044B2Extendable electrode for gas discharge laserCYMER INC·Filed 2007·Granted Dec 21, 2010·15 cites·10 claims
- 1191US6212211B1Shock wave dissipating laser chamberCYMER INC·Filed 1998·Granted Apr 3, 2001·113 cites·18 claims
- 1290US6985508B2Very narrow band, two chamber, high reprate gas discharge laser systemCYMER INC·Filed 2003·Granted Jan 10, 2006·29 cites·23 claims
- 1390US4651136APulsed magnetic release mechanismALLIED CORP·Filed 1985·Granted Mar 17, 1987·63 cites·21 claims
- 1488US6914919B2Six to ten KHz, or greater gas discharge laser systemCYMER INC·Filed 2002·Granted Jul 5, 2005·34 cites·69 claims
- 1586US6882674B2Four KHz gas discharge laser systemCYMER INC·Filed 2001·Granted Apr 19, 2005·31 cites·66 claims
- 1686US5978405ALaser chamber with minimized acoustic and shock wave disturbancesCYMER INC·Filed 1998·Granted Nov 2, 1999·68 cites·23 claims
- 1785US6801560B2Line selected F2 two chamber laser systemCYMER INC·Filed 2002·Granted Oct 5, 2004·18 cites·77 claims
- 1885US6034978AGas discharge laser with gas temperature controlCYMER INC·Filed 1999·Granted Mar 7, 2000·70 cites·28 claims
- 1982US7542502B2Thermal-expansion tolerant, preionizer electrode for a gas discharge laserCYMER INC·Filed 2005·Granted Jun 2, 2009·7 cites·19 claims
- 2082US7061961B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2005·Granted Jun 13, 2006·5 cites·20 claims
- 2180US6654403B2Flow shaping electrode with erosion pad for gas discharge laserCYMER INC·Filed 2000·Granted Nov 25, 2003·16 cites·9 claims
- 2280US5848089AExcimer laser with magnetic bearings supporting fanCYMER INC·Filed 1997·Granted Dec 8, 1998·51 cites·12 claims
- 2378US6690706B2High rep-rate laser with improved electrodesCYMER INC·Filed 2002·Granted Feb 10, 2004·17 cites·30 claims
- 2478US5548234ASystem and method for control of a Pockel's cellINTELLIGENT SURGICAL LASERS·Filed 1994·Granted Aug 20, 1996·50 cites·16 claims
- 2573US8855166B26 KHz and above gas discharge laser systemUJAZDOWSKI RICHARD C·Filed 2012·Granted Oct 7, 2014·3 cites·19 claims
- 2673US4686515AApparatus and method for marker verificationALLIED CORP·Filed 1985·Granted Aug 11, 1987·36 cites·8 claims
- 2772US8526481B2Extendable electrode for gas discharge laserSANDSTROM RICHARD L·Filed 2012·Granted Sep 3, 2013·2 cites·16 claims
- 2872US8446928B2Extendable electrode for gas discharge laserSANDSTROM RICHARD L·Filed 2010·Granted May 21, 2013·2 cites·23 claims
- 2971US11349273B2Apparatus for tuning discharge performance in a laser chamberCymer LLC·Filed 2018·Granted May 31, 2022·1 cites·29 claims
- 3069US6661826B2Laser chamber insulator with sealed electrode feedthroughCYMER INC·Filed 2002·Granted Dec 9, 2003·11 cites·20 claims
- 3168US7633989B2High pulse repetition rate gas discharge laserCYMER INC·Filed 2005·Granted Dec 15, 2009·2 cites·9 claims
- 3268US7522650B2Gas discharge laser chamber improvementsCYMER INC·Filed 2004·Granted Apr 21, 2009·8 cites·64 claims
- 3367US6937635B2High rep-rate laser with improved electrodesCYMER INC·Filed 2003·Granted Aug 30, 2005·7 cites·16 claims
- 3463US7058107B2Line selected F2 two chamber laser systemCYMER INC·Filed 2004·Granted Jun 6, 2006·5 cites·77 claims
- 3560US7218661B2Line selected F2 two chamber laser systemCYMER INC·Filed 2004·Granted May 15, 2007·4 cites·77 claims
- 3659US7301980B2Halogen gas discharge laser electrodesCYMER INC·Filed 2004·Granted Nov 27, 2007·5 cites·82 claims
- 3755US7132123B2High rep-rate laser with improved electrodesCYMER INC·Filed 2003·Granted Nov 7, 2006·3 cites·5 claims
- 3853US8814522B2Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laserAMADA YOSHIHO·Filed 2007·Granted Aug 26, 2014·1 cites·29 claims
- 3953US6034984ATangential fan with cutoff assembly and vibration control for electric discharge laserCYMER INC·Filed 1999·Granted Mar 7, 2000·17 cites·9 claims
- 4052US6023486ASoldered fan assembly for electric discharge laserCYMER INC·Filed 1999·Granted Feb 8, 2000·13 cites·23 claims
- 4149US9620920B2High pulse repetition rate gas discharge laserGILLESPIE WALTER D·Filed 2009·Granted Apr 11, 2017·0 cites·7 claims
- 4249US6061376ATangential fan for excimer laserCYMER INC·Filed 1998·Granted May 9, 2000·14 cites·30 claims
- 4346US2006222034A16 Khz and above gas discharge laser systemCYMER INC·Filed 2005·Application pending·0 cites
- 4442US2008013589A1Window assembly for a gas discharge laser chamberCYMER INC·Filed 2006·Application pending·0 cites
- 4538US2021194202A1Metrology for a body of a gas discharge stageCymer LLC·Filed 2019·Application pending·0 cites
- 4636US6144686ATangential fan with cutoff assembly and vibration control for electric discharge laserCYMER INC·Filed 1999·Granted Nov 7, 2000·6 cites·15 claims
- 4732US4675655AApparatus and method for marker verificationALLIED CORP·Filed 1985·Granted Jun 23, 1987·3 cites·15 claims
- 4824US10074953B2Erosion resistant electrodes for use in generating gas discharge laserLUO SIQI·Filed 2015·Granted Sep 11, 2018·0 cites·15 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →