Inventor · disambiguated record
Stuart L. Anderson
Also filed as: ANDERSON STUART L
15 granted patents·1,302 citations·filing 1989–2006
95Inventor score
Top patents by PatentIndex Score
15 records- 0199US6567450B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted May 20, 2003·265 cites·52 claims
- 0298US6625191B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted Sep 23, 2003·236 cites·78 claims
- 0398US5025445ASystem for, and method of, regulating the wavelength of a light beamCYMER LASER TECH·Filed 1989·Granted Jun 18, 1991·321 cites·25 claims
- 0497US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 0596US6532247B2Laser wavelength control unit with piezoelectric driverCYMER INC·Filed 2001·Granted Mar 11, 2003·79 cites·17 claims
- 0695USRE40343EControl circuit with automatic DC offsetCYMER INC·Filed 2003·Granted May 27, 2008·55 cites·12 claims
- 0793US7567607B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2006·Granted Jul 28, 2009·14 cites·3 claims
- 0892US6618421B2High repetition rate gas discharge laser with precise pulse timing controlCYMER INC·Filed 2001·Granted Sep 9, 2003·59 cites·10 claims
- 0992US6442181B1Extreme repetition rate gas discharge laserCYMER INC·Filed 2000·Granted Aug 27, 2002·56 cites·23 claims
- 1090US6985508B2Very narrow band, two chamber, high reprate gas discharge laser systemCYMER INC·Filed 2003·Granted Jan 10, 2006·29 cites·23 claims
- 1186US6882674B2Four KHz gas discharge laser systemCYMER INC·Filed 2001·Granted Apr 19, 2005·31 cites·66 claims
- 1282US7061961B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2005·Granted Jun 13, 2006·5 cites·20 claims
- 1377US6282218B1Control circuit with automatic DC offsetCYMER INC·Filed 1999·Granted Aug 28, 2001·28 cites·12 claims
- 1473US5867514ALaser wavelength control circuit having automatic DC offset and gain adjustmentCYMER INC·Filed 1997·Granted Feb 2, 1999·26 cites·22 claims
- 1545US7149234B2High repetition rate gas discharge laser with precise pulse timing controlCYMER INC·Filed 2003·Granted Dec 12, 2006·1 cites·16 claims
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