Inventor · disambiguated record
Richard L. Sandstrom
Also filed as: SANDSTROM RICHARD L
124 granted patents·8 pending applications·7,317 citations·filing 1988–2016
99Inventor score
Top patents by PatentIndex Score
132 records- 0199US6567450B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted May 20, 2003·265 cites·52 claims
- 0299US6549551B2Injection seeded laser with precise timing controlCYMER INC·Filed 2001·Granted Apr 15, 2003·186 cites·11 claims
- 0399US6005879APulse energy control for excimer laserCYMER INC·Filed 1998·Granted Dec 21, 1999·231 cites·13 claims
- 0499US5978394AWavelength system for an excimer laserCYMER INC·Filed 1998·Granted Nov 2, 1999·223 cites·13 claims
- 0598US6690704B2Control system for a two chamber gas discharge laserCYMER INC·Filed 2002·Granted Feb 10, 2004·128 cites·38 claims
- 0698US6625191B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted Sep 23, 2003·236 cites·78 claims
- 0798US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 0898US6018537AReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 1999·Granted Jan 25, 2000·280 cites·37 claims
- 0998US5991324AReliable. modular, production quality narrow-band KRF excimer laserCYMER INC·Filed 1998·Granted Nov 23, 1999·196 cites·16 claims
- 1098US5852621APulse laser with pulse energy trimmerCYMER INC·Filed 1997·Granted Dec 22, 1998·196 cites·6 claims
- 1198US5095492ASpectral narrowing techniqueCYMER LASER TECH·Filed 1990·Granted Mar 10, 1992·157 cites·29 claims
- 1298US5025445ASystem for, and method of, regulating the wavelength of a light beamCYMER LASER TECH·Filed 1989·Granted Jun 18, 1991·321 cites·25 claims
- 1398US4959840ACompact excimer laser including an electrode mounted in insulating relationship to wall of the laserCYMER LASER TECH·Filed 1988·Granted Sep 25, 1990·259 cites·21 claims
- 1497US8158960B2Laser produced plasma EUV light sourceVASCHENKO GEORGIY O·Filed 2010·Granted Apr 17, 2012·35 cites·20 claims
- 1597US7885309B2Laser systemCYMER INC·Filed 2007·Granted Feb 8, 2011·37 cites·23 claims
- 1697US7643529B2Laser systemCYMER INC·Filed 2007·Granted Jan 5, 2010·35 cites·15 claims
- 1797US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 1897US6721340B1Bandwidth control technique for a laserCYMER INC·Filed 2000·Granted Apr 13, 2004·114 cites·4 claims
- 1997US6671294B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Dec 30, 2003·114 cites·11 claims
- 2097US6576912B2Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum windowFiled 2001·Granted Jun 10, 2003·128 cites·23 claims
- 2197US6240117B1Fluorine control system with fluorine monitorCYMER INC·Filed 1998·Granted May 29, 2001·205 cites·39 claims
- 2297US6016325AMagnetic modulator voltage and temperature timing compensation circuitCYMER INC·Filed 1998·Granted Jan 18, 2000·179 cites·11 claims
- 2397US5023884ACompact excimer laserCYMER LASER TECH·Filed 1990·Granted Jun 11, 1991·204 cites·15 claims
- 2496US7920616B2Laser systemCYMER INC·Filed 2007·Granted Apr 5, 2011·32 cites·17 claims
- 2596US7715459B2Laser systemCYMER INC·Filed 2007·Granted May 11, 2010·36 cites·30 claims
- 2696US7154928B2Laser output beam wavefront splitter for bandwidth spectrum controlCYMER INC·Filed 2004·Granted Dec 26, 2006·62 cites·64 claims
- 2796US7087914B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2004·Granted Aug 8, 2006·109 cites·42 claims
- 2896US6693939B2Laser lithography light source with beam deliveryCYMER INC·Filed 2002·Granted Feb 17, 2004·115 cites·2 claims
- 2996US6566668B2Plasma focus light source with tandem ellipsoidal mirror unitsCYMER INC·Filed 2001·Granted May 20, 2003·131 cites·27 claims
- 3096US6538737B2High resolution etalon-grating spectrometerCYMER INC·Filed 2001·Granted Mar 25, 2003·109 cites·8 claims
- 3196US6532247B2Laser wavelength control unit with piezoelectric driverCYMER INC·Filed 2001·Granted Mar 11, 2003·79 cites·17 claims
- 3296US5440578AGas replenishment method and apparatus for excimer lasersCYMER LASER TECH·Filed 1993·Granted Aug 8, 1995·119 cites·20 claims
- 3395US8653437B2EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periodsPARTLO WILLIAM N·Filed 2011·Granted Feb 18, 2014·20 cites·21 claims
- 3495US6904073B2High power deep ultraviolet laser with long life opticsCYMER INC·Filed 2003·Granted Jun 7, 2005·78 cites·87 claims
- 3595US6529531B1Fast wavelength correction technique for a laserCYMER INC·Filed 2000·Granted Mar 4, 2003·86 cites·12 claims
- 3695US5978391AWavelength reference for excimer laserCYMER INC·Filed 1997·Granted Nov 2, 1999·123 cites·15 claims
- 3794US8144740B1Laser systemBROWN DANIEL J W·Filed 2009·Granted Mar 27, 2012·37 cites·16 claims
- 3894US7361918B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2006·Granted Apr 22, 2008·35 cites·6 claims
- 3994US6586757B2Plasma focus light source with active and buffer gas controlCYMER INC·Filed 2001·Granted Jul 1, 2003·139 cites·27 claims
- 4093US9232623B2Extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2014·Granted Jan 5, 2016·8 cites·28 claims
- 4193US8126027B2Line narrowing moduleALGOTS J MARTIN·Filed 2011·Granted Feb 28, 2012·21 cites·20 claims
- 4293US7567607B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2006·Granted Jul 28, 2009·14 cites·3 claims
- 4393US6750972B2Gas discharge ultraviolet wavemeter with enhanced illuminationCYMER INC·Filed 2002·Granted Jun 15, 2004·55 cites·15 claims
- 4493US6704339B2Lithography laser with beam delivery and beam pointing controlCYMER INC·Filed 2002·Granted Mar 9, 2004·50 cites·80 claims
- 4593US6590922B2Injection seeded F2 laser with line selection and discriminationCYMER INC·Filed 2001·Granted Jul 8, 2003·63 cites·18 claims
- 4693US6078599AWavelength shift correction technique for a laserCYMER INC·Filed 1997·Granted Jun 20, 2000·115 cites·18 claims
- 4792US8654438B2Master oscillator-power amplifier drive laser with pre-pulse for EUV light sourceHOU KAI-CHUNG·Filed 2011·Granted Feb 18, 2014·14 cites·20 claims
- 4892US8170078B2Laser systemERSHOV ALEXANDER I·Filed 2011·Granted May 1, 2012·11 cites·20 claims
- 4992US8138487B2System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamberVASCHENKO GEORGIY O·Filed 2010·Granted Mar 20, 2012·16 cites·22 claims
- 5092USRE38054EReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 2001·Granted Apr 1, 2003·42 cites·37 claims
Showing the top 50 of 132 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →