Inventor · disambiguated record
Rigo Richter
Also filed as: RICHTER RIGO
3 granted patents·23 citations·filing 2008–2010
64Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0184US8913120B2Method for emulation of a photolithographic process and mask inspection microscope for performing the methodPOORTINGA ERIC·Filed 2010·Granted Dec 16, 2014·16 cites·55 claims
- 0278US8730474B2Method and apparatus for measuring of masks for the photo-lithographySCHERUEBL THOMAS·Filed 2009·Granted May 20, 2014·7 cites·25 claims
- 0334US8264535B2Method and apparatus for analyzing a group of photolithographic masksKIENZLE OLIVER·Filed 2008·Granted Sep 11, 2012·0 cites·20 claims
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