Inventor · disambiguated record
Pavel Smetana
Also filed as: SMETANA PAVEL
12 granted patents·3 pending applications·208 citations·filing 1983–2012
91Inventor score
Top patents by PatentIndex Score
15 records- 0190US6626188B2Method for cleaning and preconditioning a chemical vapor deposition chamber domeIBM·Filed 2001·Granted Sep 30, 2003·46 cites·24 claims
- 0279US9080239B2Method and apparatus for angular high density plasma chemical vapor depositionYANG DAEWON·Filed 2012·Granted Jul 14, 2015·4 cites·11 claims
- 0379US4659423ASemiconductor crystal growth via variable melt rotationIBM·Filed 1986·Granted Apr 21, 1987·28 cites·48 claims
- 0470US6238532B1Radio-frequency coil for use in an ionized physical vapor deposition apparatusIBM·Filed 1999·Granted May 29, 2001·22 cites·18 claims
- 0570US5061652AMethod of manufacturing a semiconductor device structure employing a multi-level epitaxial structureIBM·Filed 1990·Granted Oct 29, 1991·53 cites·11 claims
- 0666US6176931B1Wafer clamp ring for use in an ionized physical vapor deposition apparatusIBM·Filed 1999·Granted Jan 23, 2001·28 cites·21 claims
- 0761US9016236B2Method and apparatus for angular high density plasma chemical vapor depositionYANG DAEWON·Filed 2008·Granted Apr 28, 2015·1 cites·2 claims
- 0859US7372689B2Guard wafer for semiconductor structure fabricationIBM·Filed 2005·Granted May 13, 2008·1 cites·13 claims
- 0952US7489494B2Guard wafer for semiconductor structure fabricationIBM·Filed 2008·Granted Feb 10, 2009·0 cites·7 claims
- 1052US4556448AMethod for controlled doping of silicon crystals by improved float zone techniqueIBM·Filed 1983·Granted Dec 3, 1985·10 cites·6 claims
- 1143US2008287558A1Method of the Preparation of Vulcanization Mixtures by the De-Vulcanization of Waste RubberKUBANEK VLADIMIR·Filed 2006·Application pending·0 cites
- 1237US2005011442A1Plasma processing material reclamation and reuseIBM·Filed 2003·Application pending·0 cites
- 1337US2004137745A1Method and apparatus for removing backside edge polymerIBM·Filed 2003·Application pending·0 cites
- 1436US5159429ASemiconductor device structure employing a multi-level epitaxial structure and method of manufacturing sameIBM·Filed 1992·Granted Oct 27, 1992·9 cites·6 claims
- 1534US5293516AMultiprobe apparatusIBM·Filed 1992·Granted Mar 8, 1994·6 cites·11 claims
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