Inventor · disambiguated record
Marcel Johannus Elisabeth Hubertus Muitjens
Also filed as: MUITJENS MARCEL J E H · MUITJENS MARCEL JOHANNUS ELISA · MUITJENS MARCEL JOHANNUS ELISABETH HUBERTUS
12 granted patents·82 citations·filing 2001–2020
90Inventor score
Files withASML NETHERLANDS BV9CADEE THEODORUS PETRUS MARIA2SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS1
Top patents by PatentIndex Score
12 records- 0196US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 0294US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0389US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 0488US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims
- 0586US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 0684US9606445B2Lithographic apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·5 cites·21 claims
- 0782US7542127B2Lithographic apparatus and method for manufacturing a deviceASML NETHERLANDS BV·Filed 2005·Granted Jun 2, 2009·7 cites·29 claims
- 0880US6509951B2Lithographic projection apparatus having a temperature controlled heat shieldASML NETHERLANDS BV·Filed 2001·Granted Jan 21, 2003·31 cites·20 claims
- 0974US7342237B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Mar 11, 2008·4 cites·22 claims
- 1063US10254663B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2015·Granted Apr 9, 2019·0 cites·38 claims
- 1143US9176398B2Method and system for thermally conditioning an optical elementSCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS·Filed 2009·Granted Nov 3, 2015·1 cites·13 claims
- 1237US10268128B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Apr 23, 2019·0 cites·20 claims
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