Inventor · disambiguated record

Sae-Hoon Chung

Also filed as: CHUNG SAE-HOON

2 granted patents·11 citations·filing 2002–2003

57Inventor score

Technology areasH10P

Files withUNIV SUNGKYUNKWAN2

Top patents by PatentIndex Score

2 records

0158US7094702B2Layer-by-layer etching apparatus using neutral beam and method of etching using the sameUNIV SUNGKYUNKWAN·Filed 2003·Granted Aug 22, 2006·6 cites·11 claims
0255US6874443B2Layer-by-layer etching apparatus using neutral beam and etching method using the sameUNIV SUNGKYUNKWAN·Filed 2002·Granted Apr 5, 2005·5 cites·7 claims

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