Inventor · disambiguated record
Keigo Maki
Also filed as: MAKI KEIGO
7 granted patents·2 pending applications·577 citations·filing 2002–2016
84Inventor score
Files withSUMITOMO OSAKA CEMENT CO LTD3HIMORI SHINJI2INAZUMACHI HIROSHI1MAKI KEIGO1SHINKO ELECTRIC IND CO1
Top patents by PatentIndex Score
9 records- 0196US7678197B2Susceptor deviceSUMITOMO OSAKA CEMENT CO LTD·Filed 2003·Granted Mar 16, 2010·541 cites·7 claims
- 0292US7619870B2Electrostatic chuckTOKYO ELECTRON LTD·Filed 2007·Granted Nov 17, 2009·24 cites·15 claims
- 0375US8284538B2Electrostatic chuck deviceHIMORI SHINJI·Filed 2007·Granted Oct 9, 2012·5 cites·15 claims
- 0456US6689984B2Susceptor with built-in electrode and manufacturing method thereforSUMITOMO OSAKA CEMENT CO LTD·Filed 2002·Granted Feb 10, 2004·6 cites·12 claims
- 0554US8264813B2Electrostatic chuck deviceINAZUMACHI HIROSHI·Filed 2007·Granted Sep 11, 2012·1 cites·11 claims
- 0644US2008062610A1Electrostatic chuck deviceHIMORI SHINJI·Filed 2007·Application pending·0 cites
- 0743US2008316721A1Electrode structure body and method of forming the same, electronic component, and mounting substrateSHINKO ELECTRIC IND CO·Filed 2008·Application pending·0 cites
- 0836US11024528B2Electrostatic chuck device having focus ringSUMITOMO OSAKA CEMENT CO LTD·Filed 2016·Granted Jun 1, 2021·0 cites·17 claims
- 0930US8168452B2Method for manufacturing semiconductor deviceMAKI KEIGO·Filed 2010·Granted May 1, 2012·0 cites·9 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →