Inventor · disambiguated record
Shigetaro Ogura
Also filed as: OGURA SHIGETARO
11 granted patents·570 citations·filing 1983–2000
93Inventor score
Top patents by PatentIndex Score
11 records- 0195US5153898AX-ray reduction projection exposure system of reflection typeCANON KK·Filed 1992·Granted Oct 6, 1992·158 cites·71 claims
- 0291US5052033AReflection type maskCANON KK·Filed 1990·Granted Sep 24, 1991·75 cites·30 claims
- 0388US5433988AMulti-layer reflection mirror for soft X-ray to vacuum ultraviolet rayCANON KK·Filed 1994·Granted Jul 18, 1995·80 cites·11 claims
- 0487US6207536B1Method for forming a thin film of a composite metal compound and apparatus for carrying out the methodSHINCRON CO LTD·Filed 1998·Granted Mar 27, 2001·67 cites·11 claims
- 0586US5310603AMulti-layer reflection mirror for soft X-ray to vacuum ultraviolet rayCANON KK·Filed 1993·Granted May 10, 1994·66 cites·31 claims
- 0678US4531138ALiquid jet recording method and apparatusCANON KK·Filed 1983·Granted Jul 23, 1985·22 cites·13 claims
- 0776US4637684AMethod of making an optical coupler device utilizing volatile liquid to achieve optical contactCANON KK·Filed 1985·Granted Jan 20, 1987·36 cites·7 claims
- 0875US4707059AIntegrated optical circuit element and method of making the sameCANON KK·Filed 1983·Granted Nov 17, 1987·29 cites·5 claims
- 0966US5012500AX-ray mask support member, X-ray mask, and X-ray exposure process using the X-ray maskCANON KK·Filed 1988·Granted Apr 30, 1991·16 cites·36 claims
- 1062US6328865B2Method for forming a thin film of a composite metal compound and apparatus for carrying out the methodSHINCRON CO LTD·Filed 2000·Granted Dec 11, 2001·7 cites·12 claims
- 1153US4856861ALight waveguide lensCANON KK·Filed 1987·Granted Aug 15, 1989·14 cites·8 claims
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