Inventor · disambiguated record
Yasuaki Fukuda
Also filed as: FUKUDA YASUAKI
29 granted patents·873 citations·filing 1980–2006
97Inventor score
Top patents by PatentIndex Score
29 records- 0195US5153898AX-ray reduction projection exposure system of reflection typeCANON KK·Filed 1992·Granted Oct 6, 1992·158 cites·71 claims
- 0292US5390228AMethod of and apparatus for stabilizing shapes of objects, such as optical elements, as well as exposure apparatus using same and method of manufacturing semiconductor devicesCANON KK·Filed 1994·Granted Feb 14, 1995·90 cites·21 claims
- 0391US5052033AReflection type maskCANON KK·Filed 1990·Granted Sep 24, 1991·75 cites·30 claims
- 0488US5433988AMulti-layer reflection mirror for soft X-ray to vacuum ultraviolet rayCANON KK·Filed 1994·Granted Jul 18, 1995·80 cites·11 claims
- 0586US5310603AMulti-layer reflection mirror for soft X-ray to vacuum ultraviolet rayCANON KK·Filed 1993·Granted May 10, 1994·66 cites·31 claims
- 0681US5808312ASystem and process for inspecting and repairing an originalCANON KK·Filed 1996·Granted Sep 15, 1998·56 cites·23 claims
- 0780US5204887AX-ray microscopeCANON KK·Filed 1992·Granted Apr 20, 1993·49 cites·47 claims
- 0878US5262257AMask for lithographyCANON KK·Filed 1993·Granted Nov 16, 1993·32 cites·23 claims
- 0973US7657219B2Image forming apparatusSHARP KK·Filed 2006·Granted Feb 2, 2010·4 cites·21 claims
- 1071US5159621AX-ray transmitting window and method of mounting the sameCANON KK·Filed 1991·Granted Oct 27, 1992·22 cites·10 claims
- 1169US5123036AX-ray exposure apparatusCANON KK·Filed 1991·Granted Jun 16, 1992·32 cites·17 claims
- 1268US5469489AProduction method of an x-ray mask structure, an x-ray mask structure produced thereby, and a device fabricated by using the x-ray mask structureCANON KK·Filed 1995·Granted Nov 21, 1995·26 cites·17 claims
- 1367US5042945ALithographic mask structure and device for positioning the sameCANON KK·Filed 1989·Granted Aug 27, 1991·18 cites·2 claims
- 1466US5012500AX-ray mask support member, X-ray mask, and X-ray exposure process using the X-ray maskCANON KK·Filed 1988·Granted Apr 30, 1991·16 cites·36 claims
- 1565US5356686AX-ray mask structureCANON KK·Filed 1994·Granted Oct 18, 1994·22 cites·6 claims
- 1663US5606586AX-ray exposure method and apparatus and device manufacturing methodCANON KK·Filed 1996·Granted Feb 25, 1997·21 cites·11 claims
- 1762US5528654AMultilayer film for X-raysCANON KK·Filed 1994·Granted Jun 18, 1996·21 cites·20 claims
- 1859US5101420AX-ray mask support and process for preparation thereofCANON KK·Filed 1991·Granted Mar 31, 1992·14 cites·81 claims
- 1956US6819396B1Exposure apparatus, and device manufacturing methodCANON KK·Filed 2000·Granted Nov 16, 2004·4 cites·36 claims
- 2056US5335259AX-ray exposure apparatusCANON KK·Filed 1993·Granted Aug 2, 1994·13 cites·16 claims
- 2155US5333167AMask structure for x-ray exposure and x-ray exposure device and method using itCANON KK·Filed 1992·Granted Jul 26, 1994·11 cites·34 claims
- 2246US5751780AX-ray mask structure, preparation thereof and X-ray exposure methodCANON KK·Filed 1994·Granted May 12, 1998·7 cites·16 claims
- 2339US5656398AMethod of making X-ray mask structureCANON KK·Filed 1995·Granted Aug 12, 1997·5 cites·30 claims
- 2439US5182763AReflection deviceCANON KK·Filed 1992·Granted Jan 26, 1993·8 cites·32 claims
- 2539US4361581ASkin-beautifying cosmetic compositionFUKUDA YASUAKI·Filed 1980·Granted Nov 30, 1982·10 cites·6 claims
- 2638US6167111AExposure apparatus for synchrotron radiation lithographyCANON KK·Filed 1998·Granted Dec 26, 2000·5 cites·16 claims
- 2736US5607733AProcess for preparing an X-ray mask structureCANON KK·Filed 1995·Granted Mar 4, 1997·4 cites·10 claims
- 2833US5048066AX-ray exposure process for preventing electrostatic attraction or contact of X-ray masksCANON KK·Filed 1990·Granted Sep 10, 1991·2 cites·23 claims
- 2930US5145649AApparatus for cleaning an optical element for use with a radiation beamCANON KK·Filed 1990·Granted Sep 8, 1992·2 cites·11 claims
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