Inventor · disambiguated record
Brian Felker
Also filed as: FELKER BRIAN · FELKER BRIAN S · FELKER BRIAN SCOTT
3 granted patents·303 citations·filing 1991–2001
76Inventor score
Top patents by PatentIndex Score
3 records- 0194US5413670AMethod for plasma etching or cleaning with diluted NF3AIR PROD & CHEM·Filed 1993·Granted May 9, 1995·268 cites·8 claims
- 0268US6508948B2Cyanuric fluoride and related compounds for anisotropic etchingAIR PROD & CHEM·Filed 2001·Granted Jan 21, 2003·13 cites·34 claims
- 0357US5196814AHigh power, high frequency, vacuum flangeUS ENERGY·Filed 1991·Granted Mar 23, 1993·22 cites·13 claims
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