Inventor · disambiguated record
Tomowaki Takahashi
Also filed as: TAKAHASHI TOMOWAKI
38 granted patents·3 pending applications·2,284 citations·filing 1981–2008
98Inventor score
Top patents by PatentIndex Score
41 records- 0197USRE39024EExposure apparatus having catadioptric projection optical systemNIPPON KOGAKU KK·Filed 2000·Granted Mar 21, 2006·101 cites·37 claims
- 0297US5861997ACatadioptric reduction projection optical system and exposure apparatus having the sameNIKON CORP·Filed 1995·Granted Jan 19, 1999·185 cites·14 claims
- 0397US5689377ACatadioptric optical system and exposure apparatus having the sameNIKON CORP·Filed 1996·Granted Nov 18, 1997·274 cites·32 claims
- 0496USRE38438ECatadioptric reduction projection optical system and exposure apparatus having the sameNIPPON KOGAKU KK·Filed 2001·Granted Feb 24, 2004·92 cites·66 claims
- 0596US6172825B1Catoptric reduction projection optical system and projection exposure apparatus and method using sameNIKON CORP·Filed 1999·Granted Jan 9, 2001·175 cites·34 claims
- 0696US5636066AOptical apparatusNIKON CORP·Filed 1994·Granted Jun 3, 1997·190 cites·64 claims
- 0795USRE38421EExposure apparatus having catadioptric projection optical systemNIPPON KOGAKU KK·Filed 2001·Granted Feb 10, 2004·63 cites·96 claims
- 0895US5691802ACatadioptric optical system and exposure apparatus having the sameNIKON CORP·Filed 1995·Granted Nov 25, 1997·178 cites·35 claims
- 0994US5805334ACatadioptric projection systemsNIKON CORP·Filed 1997·Granted Sep 8, 1998·98 cites·26 claims
- 1093US6707616B1Projection exposure apparatus, projection exposure method and catadioptric optical systemNIKON CORP·Filed 2000·Granted Mar 16, 2004·53 cites·104 claims
- 1193US6302548B2Catoptric reduction projection optical system and exposure apparatus and method using sameNIKON CORP·Filed 2001·Granted Oct 16, 2001·43 cites·18 claims
- 1293US6157498ADual-imaging optical systemNIKON CORP·Filed 1997·Granted Dec 5, 2000·78 cites·19 claims
- 1393US5999333AExposure apparatus having catadioptric projection optical systemNIKON CORP·Filed 1997·Granted Dec 7, 1999·76 cites·31 claims
- 1493US5808805AExposure apparatus having catadioptric projection optical systemNIKON CORP·Filed 1995·Granted Sep 15, 1998·98 cites·25 claims
- 1592US6213610B1Catoptric reduction projection optical system and exposure apparatus and method using sameNIKON CORP·Filed 1999·Granted Apr 10, 2001·80 cites·10 claims
- 1691USRE39296ECatadioptric projection systemsNIPPON KOGAKU KK·Filed 2000·Granted Sep 19, 2006·46 cites·60 claims
- 1791US7030965B2Catadioptric system and exposure device having this systemNIKON CORP·Filed 2001·Granted Apr 18, 2006·56 cites·34 claims
- 1890US6392822B1Dual-imaging optical systemNIKON CORP·Filed 2000·Granted May 21, 2002·36 cites·32 claims
- 1988US7283206B2Projection optical system, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2006·Granted Oct 16, 2007·20 cites·24 claims
- 2088US6538821B2Projection optical systemNIKON CORP·Filed 2000·Granted Mar 25, 2003·33 cites·43 claims
- 2186US7483122B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2007·Granted Jan 27, 2009·7 cites·3 claims
- 2286US7312851B2Projection optical system, exposure apparatus, and exposure method in which a reflective projection optical system has a non-circular aperture stopNIKON CORP·Filed 2005·Granted Dec 25, 2007·7 cites·18 claims
- 2386US6109756ACatoptric reduction projection optical systemNIKON CORP·Filed 1999·Granted Aug 29, 2000·59 cites·17 claims
- 2486US6097537ACatadioptric optical systemNIKON CORP·Filed 1999·Granted Aug 1, 2000·64 cites·13 claims
- 2577US5969882ACatadioptric optical systemNIKON CORP·Filed 1998·Granted Oct 19, 1999·46 cites·23 claims
- 2672US5956182AProjection optical systemNIKON CORP·Filed 1997·Granted Sep 21, 1999·32 cites·19 claims
- 2770US7436589B2Reflective-type projection optical system and exposure apparatus equipped with said reflective-type projection optical systemNIKON CORP·Filed 2005·Granted Oct 14, 2008·2 cites·13 claims
- 2868US4437733AZoom lensNIPPON KOGAKU KK·Filed 1981·Granted Mar 20, 1984·24 cites·10 claims
- 2963US4632519AZoom lens including a wide angle of viewNIPPON KOGAKU KK·Filed 1984·Granted Dec 30, 1986·17 cites·15 claims
- 3062US7470033B2Reflection-type projection-optical systems, and exposure apparatus comprising sameNIKON CORP·Filed 2007·Granted Dec 30, 2008·1 cites·37 claims
- 3162US6781766B2Projection optical systemNIKON CORP·Filed 2003·Granted Aug 24, 2004·6 cites·22 claims
- 3255US4653872AAthermalized zoom lens systemNIPPON KOGAKU KK·Filed 1982·Granted Mar 31, 1987·13 cites·31 claims
- 3352US4588265ATelecentric rear converterNIPPON KOGAKU KK·Filed 1982·Granted May 13, 1986·12 cites·22 claims
- 3451US7692767B2Projection optical system and exposure apparatus with the sameNIKON CORP·Filed 2004·Granted Apr 6, 2010·2 cites·11 claims
- 3550US2009097106A1Reflective-Type Projection Optical System and Exposure Apparatus Equipped with the Reflective-Type Projection Optical SystemNIKON CORP·Filed 2008·Application pending·0 cites
- 3647US4770511AZoom lens capable of accomplishing macro-photographyNIPPON KOGAKU KK·Filed 1985·Granted Sep 13, 1988·12 cites·7 claims
- 3744US7630057B2Projection optical system, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2006·Granted Dec 8, 2009·0 cites·25 claims
- 3842US6867931B2Dual-imaging optical systemNIKON CORP·Filed 2002·Granted Mar 15, 2005·0 cites·36 claims
- 3939US2004125353A1Projection optical system and exposure apparatus equipped with the projection optical systemNIKON CORP·Filed 2003·Application pending·0 cites
- 4036US4699475AZoom lens including a wide angle of viewNIPPON KOGAKU KK·Filed 1982·Granted Oct 13, 1987·5 cites·25 claims
- 4136US2004189965A1Projection optical system and exposure device having the projection optical systemFiled 2002·Application pending·0 cites
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