Inventor · disambiguated record
Benjamin Andrew Sams
Also filed as: SAMS BENJAMIN · SAMS BENJAMIN A · SAMS BENJAMIN ANDREW
7 granted patents·2 pending applications·62 citations·filing 2010–2023
76Inventor score
Top patents by PatentIndex Score
9 records- 0192US9020639B2Multimodal dynamic robotic systemsBEWLEY THOMAS R·Filed 2010·Granted Apr 28, 2015·62 cites·46 claims
- 0260US11317501B2Method of purifying target material for an EUV light sourceASML NETHERLANDS BV·Filed 2019·Granted Apr 26, 2022·0 cites·15 claims
- 0353US12295088B2Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systemsASML NETHERLANDS BV·Filed 2021·Granted May 6, 2025·0 cites·21 claims
- 0453US12222050B2Robust fluid coupling apparatusASML NETHERLANDS BV·Filed 2021·Granted Feb 11, 2025·0 cites·25 claims
- 0553US10455680B2Method and apparatus for purifying target material for EUV light sourceASML NETHERLANDS BV·Filed 2016·Granted Oct 22, 2019·0 cites·17 claims
- 0652US12352371B2Fluid control device and method for fluid control in an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2020·Granted Jul 8, 2025·0 cites·23 claims
- 0752US12139436B2Droplet generator nozzleASML NETHERLANDS BV·Filed 2020·Granted Nov 12, 2024·0 cites·20 claims
- 0845US2025227834A1High pressure coupling assemblyASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0936US2024164004A1Target material transfer system components and methods of making the sameASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
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