Inventor · disambiguated record
Dae Jin Seong
Also filed as: SEONG DAE JIN
4 granted patents·3 pending applications·1 citations·filing 2002–2019
55Inventor score
Files withKOREA RES INST OF STANDARDS3KOREA RES INST STANDARDS & SCI3KOREA RES INST OF STANDARS AND1
Top patents by PatentIndex Score
7 records- 0148US7830505B2Structure for diagnosis system of reaction processKOREA RES INST OF STANDARDS·Filed 2008·Granted Nov 9, 2010·0 cites·23 claims
- 0239US11867643B2Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buriedKOREA RES INST STANDARDS & SCI·Filed 2019·Granted Jan 9, 2024·0 cites·20 claims
- 0339US11211231B2Plasma generation apparatusKOREA RES INST STANDARDS & SCI·Filed 2018·Granted Dec 28, 2021·0 cites·15 claims
- 0439US2008000585A1Apparatus for monitoring electron density and electron temperature of plasma and method thereofKOREA RES INST OF STANDARDS·Filed 2006·Application pending·0 cites
- 0536US2014148014A1Substrate processing apparatus and substrate processing methodKOREA RES INST OF STANDARDS·Filed 2013·Application pending·0 cites
- 0630US2016274018A1Gas permeability measurement apparatus and gas permeability measurement methodKOREA RES INST STANDARDS & SCI·Filed 2016·Application pending·0 cites
- 0728US6687626B2Apparatus for measuring distribution of flow rates of flowable mediumKOREA RES INST OF STANDARS AND·Filed 2002·Granted Feb 3, 2004·1 cites·14 claims
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