Inventor · disambiguated record
Shang-Yuan Yu
Also filed as: YU SHANG-YUAN
8 granted patents·1 pending application·1 citations·filing 2012–2024
73Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG CO LTD9
Top patents by PatentIndex Score
9 records- 0170US2024350985A1System for storing chemical liquid and method for adjusting gas concentration in chemical liquidTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0259US11090696B2Apparatus and method of removing photoresist layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 17, 2021·0 cites·20 claims
- 0356US12053745B2System for storing chemical liquid and method for adjusting gas concentration in chemical liquidTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 6, 2024·0 cites·20 claims
- 0456US10510527B2Single wafer cleaning tool with H2SO4 recyclingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 17, 2019·1 cites·20 claims
- 0554US10486204B2Semiconductor apparatus and method of removing photoresist layer on substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Nov 26, 2019·0 cites·21 claims
- 0648US9805946B2Photoresist removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Oct 31, 2017·0 cites·20 claims
- 0747US11664235B2Photoresist removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 30, 2023·0 cites·20 claims
- 0838US9349617B2Mechanisms for wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted May 24, 2016·0 cites·13 claims
- 0937US9781994B2Wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2012·Granted Oct 10, 2017·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →