Inventor · disambiguated record
Eiji Sakamoto
Also filed as: SAKAMOTO EIJI
52 granted patents·9 pending applications·1,314 citations·filing 1985–2025
98Inventor score
Top patents by PatentIndex Score
61 records- 0196US11634608B2Compound having isocyanuric skeleton and composition in which said compound is includedDAIKIN IND LTD·Filed 2021·Granted Apr 25, 2023·7 cites·12 claims
- 0293US5063582ALiquid cooled x-ray lithographic exposure apparatusCANON KK·Filed 1991·Granted Nov 5, 1991·91 cites·17 claims
- 0392US6495847B1Stage control apparatus and exposure apparatusCANON KK·Filed 1999·Granted Dec 17, 2002·94 cites·52 claims
- 0491US5577552ATemperature controlling device for mask and wafer holdersCANON KK·Filed 1995·Granted Nov 26, 1996·95 cites·4 claims
- 0591US5374829AVacuum chuckCANON KK·Filed 1994·Granted Dec 20, 1994·135 cites·9 claims
- 0691US5231291AWafer table and exposure apparatus with the sameCANON KK·Filed 1992·Granted Jul 27, 1993·149 cites·16 claims
- 0790US10988633B2Compound having isocyanuric skeleton and composition in which said compound is includedDAIKIN IND LTD·Filed 2017·Granted Apr 27, 2021·2 cites·7 claims
- 0889US5220171AWafer holding device in an exposure apparatusCANON KK·Filed 1991·Granted Jun 15, 1993·117 cites·20 claims
- 0987US6097790APressure partition for X-ray exposure apparatusCANON KK·Filed 1998·Granted Aug 1, 2000·60 cites·14 claims
- 1087US5637142ANonaqueous emulsified surface treating agent compositionDAIKIN IND LTD·Filed 1993·Granted Jun 10, 1997·38 cites·21 claims
- 1185US5113181ADisplay apparatusCANON KK·Filed 1989·Granted May 12, 1992·57 cites·12 claims
- 1284US7265812B2Cooling apparatusCANON KK·Filed 2006·Granted Sep 4, 2007·5 cites·15 claims
- 1383US5138643AExposure apparatusCANON KK·Filed 1990·Granted Aug 11, 1992·42 cites·9 claims
- 1482US5524131AAlignment apparatus and SOR x-ray exposure apparatus having sameCANON KK·Filed 1995·Granted Jun 4, 1996·46 cites·20 claims
- 1581US10781335B2Functional filmDAIKIN IND LTD·Filed 2017·Granted Sep 22, 2020·1 cites·7 claims
- 1681US4969168AWafer supporting apparatusCANON KK·Filed 1989·Granted Nov 6, 1990·54 cites·8 claims
- 1780US11340581B2NC program conversion process method and processing treatment systemHITACHI LTD·Filed 2019·Granted May 24, 2022·2 cites·27 claims
- 1880US10303069B2Pattern forming method and method of manufacturing articleCANON KK·Filed 2015·Granted May 28, 2019·2 cites·30 claims
- 1979US6081319AIllumination system and scan type exposure apparatusCANON KK·Filed 1995·Granted Jun 27, 2000·45 cites·39 claims
- 2078US7116501B2Optical element holder, exposure apparatus, and device fabricating methodCANON KK·Filed 2005·Granted Oct 3, 2006·6 cites·11 claims
- 2178US6829034B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2001·Granted Dec 7, 2004·16 cites·51 claims
- 2277US7214549B2Correcting device, exposure apparatus, device production method, and device produced by the device production methodCANON KK·Filed 2005·Granted May 8, 2007·3 cites·9 claims
- 2377US5822389AAlignment apparatus and SOR X-ray exposure apparatus having sameCANON KK·Filed 1995·Granted Oct 13, 1998·36 cites·5 claims
- 2476US7145632B2Cooling apparatusCANON KK·Filed 2005·Granted Dec 5, 2006·3 cites·12 claims
- 2576US5610965AExposure methodCANON KK·Filed 1994·Granted Mar 11, 1997·29 cites·15 claims
- 2676US5093579AExposure apparatus with a substrate holding mechanismCANON KK·Filed 1990·Granted Mar 3, 1992·61 cites·16 claims
- 2776US4744637ALiquid crystal device with a protective layer of a particular coefficient of expansionCANON KK·Filed 1985·Granted May 17, 1988·35 cites·18 claims
- 2875US8258637B2Bonding structure and method for manufacturing sameSAKAMOTO EIJI·Filed 2010·Granted Sep 4, 2012·5 cites·11 claims
- 2973US11561527B2NC program conversion process method and processing treatment systemHITACHI LTD·Filed 2022·Granted Jan 24, 2023·0 cites·3 claims
- 3071US6951766B2Correcting device, exposure apparatus, device production method, and device produced by the device production methodCANON KK·Filed 2001·Granted Oct 4, 2005·9 cites·10 claims
- 3169US4777117AProcess for producing color filter using alignment marksCANON KK·Filed 1986·Granted Oct 11, 1988·19 cites·7 claims
- 3267US8003193B2Functional deviceHITACHI LTD·Filed 2007·Granted Aug 23, 2011·3 cites·6 claims
- 3367US7939938B2Functional device package with metallization arrangement for improved bondability of two substratesHITACHI METALS LTD·Filed 2008·Granted May 10, 2011·4 cites·11 claims
- 3467US6934003B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2002·Granted Aug 23, 2005·6 cites·56 claims
- 3566US8269301B2Submount for optical device and its manufacturing methodHATA SHOHEI·Filed 2007·Granted Sep 18, 2012·4 cites·12 claims
- 3665US11572434B2Curable composition, method for producing same, and article using sameDAIKIN IND LTD·Filed 2018·Granted Feb 7, 2023·0 cites·10 claims
- 3756US5907390APositioning apparatus, exposure apparatus and method of manufacturing semiconductor deviceCANON KK·Filed 1997·Granted May 25, 1999·15 cites·20 claims
- 3855US11008466B2Curable composition, process for producing same, and article produced therewithDAIKIN IND LTD·Filed 2017·Granted May 18, 2021·0 cites·12 claims
- 3953US11142653B2Method for producing antifouling filmSHARP KK·Filed 2017·Granted Oct 12, 2021·0 cites·10 claims
- 4053US7182794B2Correcting device, exposure apparatus, device production method, and device produced by the device production methodCANON KK·Filed 2005·Granted Feb 27, 2007·0 cites·12 claims
- 4153US7138282B2Correcting device, exposure apparatus, device production method, and device produced by the device production methodCANON KK·Filed 2005·Granted Nov 21, 2006·0 cites·18 claims
- 4253US2006077363A1Correcting device, exposure apparatus, device production method, and device produced by the device production methodCANON KK·Filed 2005·Application pending·0 cites
- 4353US2025263331A1LaminateDAIKIN IND LTD·Filed 2025·Application pending·0 cites
- 4451US11142617B2Method for producing antifouling filmSHARP KK·Filed 2017·Granted Oct 12, 2021·0 cites·10 claims
- 4549US7463331B2Exposure apparatus and method for manufacturing deviceCANON KK·Filed 2007·Granted Dec 9, 2008·0 cites·8 claims
- 4649US4829485AMethod of reading signals in a charge-storage line sensor in which each storage device is sequentially read and then reset during a subsequent dead time intervalCANON KK·Filed 1987·Granted May 9, 1989·9 cites·10 claims
- 4748US2010047588A1Electronic Component Union, Electronic Circuit Module Utilizing the Same, and Process for Manufacturing the SameHATA SYOHEI·Filed 2007·Application pending·0 cites
- 4847US12030148B2NC program generation system and NC program generation methodHITACHI LTD·Filed 2020·Granted Jul 9, 2024·0 cites·16 claims
- 4947US6293972B1Process for fluorinating cellulosic materials and fluorinated cellulosic materialsDAIKIN IND LTD·Filed 1997·Granted Sep 25, 2001·9 cites·8 claims
- 5047US2006176588A1Optical element holder, exposure apparatus, and device fabricating methodSAKAMOTO EIJI·Filed 2006·Application pending·0 cites
Showing the top 50 of 61 patent records by PatentIndex Score.
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