Inventor · disambiguated record
Johannes M. M. Van Kimmenade
Also filed as: VAN KIMMENADE JOHANNES M M
6 granted patents·247 citations·filing 1986–2002
87Inventor score
Top patents by PatentIndex Score
6 records- 0188US5150153ALithographic device with a suspended object tablePHILIPS CORP·Filed 1991·Granted Sep 22, 1992·66 cites·9 claims
- 0284US5844666APositioning device with a vibration-free object table, and lithographic device provided with such a positioning devicePHILIPS CORP·Filed 1996·Granted Dec 1, 1998·52 cites·22 claims
- 0383US5844664APositioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning devicePHILIPS CORP·Filed 1996·Granted Dec 1, 1998·61 cites·20 claims
- 0478US5953105APositioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning devicePHILIPS CORP·Filed 1996·Granted Sep 14, 1999·48 cites·11 claims
- 0559US4746800APositioning device comprising a z-manipulator and a θ-manipulatorASM LITHOGRAPHY BV·Filed 1986·Granted May 24, 1988·16 cites·11 claims
- 0657USRE40774EPositioning device with a vibration-free object table, and lithographic device provided with such a positioning deviceASML NETHERLANDS BV·Filed 2002·Granted Jun 23, 2009·4 cites·44 claims
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