Inventor · disambiguated record
Fransiscus Mathijs Jacobs
Also filed as: JACOBS FRANSISCUS M · JACOBS FRANSISCUS MATHIJS
11 granted patents·2 pending applications·278 citations·filing 1991–2017
89Inventor score
Files withASML NETHERLANDS BV9PHILIPS CORP2BEERENS RUUD ANTONIUS CATHARINA MARIA1KRUIZINGA MATTHIAS1
Top patents by PatentIndex Score
13 records- 0194US5172160AOptical lithographic device having a machine frame with force compensationPHILIPS CORP·Filed 1991·Granted Dec 15, 1992·124 cites·10 claims
- 0290US6721035B1Lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Apr 13, 2004·48 cites·29 claims
- 0388US5150153ALithographic device with a suspended object tablePHILIPS CORP·Filed 1991·Granted Sep 22, 1992·66 cites·9 claims
- 0486US6404483B1Substrate handler for use in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Jun 11, 2002·31 cites·10 claims
- 0585US10191393B2Lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jan 29, 2019·3 cites·22 claims
- 0669US8189174B2Lithographic apparatus provided with a swap bridgeKRUIZINGA MATTHIAS·Filed 2009·Granted May 29, 2012·4 cites·7 claims
- 0768US8368868B2Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactlessASML NETHERLANDS BV·Filed 2009·Granted Feb 5, 2013·2 cites·14 claims
- 0847US9575416B2Lithographic apparatus, device manufacturing method and displacement measurement systemASML NETHERLANDS BV·Filed 2013·Granted Feb 21, 2017·0 cites·11 claims
- 0946US2009168037A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 1045US2009168042A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 1144US10816910B2Vibration isolator, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Oct 27, 2020·0 cites·27 claims
- 1241US10503086B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 10, 2019·0 cites·15 claims
- 1339US8334983B2Lithographic apparatus and device manufacturing methodBEERENS RUUD ANTONIUS CATHARINA MARIA·Filed 2010·Granted Dec 18, 2012·0 cites·20 claims
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