Inventor · disambiguated record
Kazuhiro Hirano
Also filed as: HIRANO KAZUHIRO
11 granted patents·5 pending applications·93 citations·filing 1993–2018
88Inventor score
Files withNIKON CORP7YANG PAI-HSUEH4NIKON RES CORPORATION OF AMERICA1OMRON TATEISI ELECTRONICS CO1SHIBAZAKI YUICHI1
Top patents by PatentIndex Score
16 records- 0187US5329336AExposure method and apparatusNIKON CORP·Filed 1993·Granted Jul 12, 1994·57 cites·14 claims
- 0282US8488106B2Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Jul 16, 2013·9 cites·64 claims
- 0380US8140288B2On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stageYANG PAI-HSUEH·Filed 2007·Granted Mar 20, 2012·6 cites·41 claims
- 0479US9465305B2Method for determining a commutation offset and for determining a compensation map for a stageYANG PAI-HSUEH·Filed 2011·Granted Oct 11, 2016·3 cites·41 claims
- 0566US9013134B2Method for determing a commutation offset and for determining a compensation map for a stageYANG PAI-HSUEH·Filed 2011·Granted Apr 21, 2015·1 cites·20 claims
- 0665US11223303B2Motor with force constant modeling and identification for flexible mode controlNIKON RES CORPORATION OF AMERICA·Filed 2018·Granted Jan 11, 2022·1 cites·20 claims
- 0762US7366642B2Minimum force output control method for counter-mass with cableNIKON CORP·Filed 2005·Granted Apr 29, 2008·2 cites·30 claims
- 0858US7034474B2Auto-calibration of attraction-only type actuator commutationsNIKON CORP·Filed 2004·Granted Apr 25, 2006·9 cites·53 claims
- 0952US2001054014A1Client information collecting method, client information providing method, point assigning method, merchandise information providing method, and merchandise information collection apparatus using networkFiled 2001·Application pending·0 cites
- 1051US7253576B2E/I core actuator commutation formula and control methodNIKON CORP·Filed 2004·Granted Aug 7, 2007·3 cites·32 claims
- 1147US8341999B2Terminal and method for producing the sameOMRON TATEISI ELECTRONICS CO·Filed 2007·Granted Jan 1, 2013·2 cites·3 claims
- 1240US2015241794A1Coil Switching Method for Moving Magnet Planar MotorNIKON CORP·Filed 2014·Application pending·0 cites
- 1340US2012319637A1Synchronization control devices and methodsYANG PAI-HSUEH·Filed 2011·Application pending·0 cites
- 1436US2004128918A1Control system and method for improving tracking accuracy of a stage through processing of information from previous operationsFiled 2003·Application pending·0 cites
- 1535US2015241525A1Dynamic Correction to Remove the Influence of Motor Coil Flux on Hall Sensor MeasurementNIKON CORP·Filed 2014·Application pending·0 cites
- 1634US10261419B2Magnet array for moving magnet planar motorNIKON CORP·Filed 2015·Granted Apr 16, 2019·0 cites·16 claims
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