Inventor · disambiguated record
Akira Okutomi
Also filed as: OKUTOMI AKIRA
1 granted patent·1 pending application·9 citations·filing 2010–2013
31Inventor score
Top patents by PatentIndex Score
2 records- 0182US8488106B2Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing methodSHIBAZAKI YUICHI·Filed 2010·Granted Jul 16, 2013·9 cites·64 claims
- 0233US2013182235A1Measurement system that includes an encoder and an interferometerNIKON COPORATION·Filed 2013·Application pending·0 cites
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