Inventor · disambiguated record
Dries Vaast Paul Hemschoote
Also filed as: HEMSCHOOTE DRIES · HEMSCHOOTE DRIES VAAST PAUL
4 granted patents·15 citations·filing 2005–2019
67Inventor score
Top patents by PatentIndex Score
4 records- 0189US10747127B2Lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 18, 2020·5 cites·26 claims
- 0277US7478481B2Measurement configuration based on linear scales able to measure to a target also moving perpendicular to the measurement axisLEUVEN K U RES & DEV·Filed 2005·Granted Jan 20, 2009·10 cites·15 claims
- 0348US11681233B2Gas mixing for fast temperature control of a cooling hoodASML NETHERLANDS BV·Filed 2019·Granted Jun 20, 2023·0 cites·20 claims
- 0448US11320751B2Apparatus incorporating a gas lockASML NETHERLANDS BV·Filed 2019·Granted May 3, 2022·0 cites·19 claims
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