Inventor · disambiguated record
Mihail Mihalov
Also filed as: MIHALOV MIHAIL · MIHALOV MIHAIL V
4 granted patents·2 pending applications·53 citations·filing 1986–2008
77Inventor score
Top patents by PatentIndex Score
6 records- 0186US7734437B2Apparatus for designing an optical metrology system optimized with signal criteriaTOKYO ELECTRON LTD·Filed 2008·Granted Jun 8, 2010·12 cites·20 claims
- 0285US7589845B1Process control using an optical metrology system optimized with signal criteriaTOKYO ELECTRON LTD·Filed 2008·Granted Sep 15, 2009·16 cites·20 claims
- 0383US7742889B2Designing an optical metrology system optimized with signal criteriaTOKYO ELECTRON LTD·Filed 2008·Granted Jun 22, 2010·9 cites·20 claims
- 0456US2009234687A1Method of designing an optical metrology system optimized for operating time budgetTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0551US4757618AShip system for the recovery of fuel oil from sludge removed by flushing of heavy oil purifiersKORABOSTROENE K·Filed 1986·Granted Jul 19, 1988·16 cites·3 claims
- 0646US2009240537A1Apparatus for designing an optical metrology system optimized for operating time budgetTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →