Inventor · disambiguated record

Maria Isabel Catalina Caballero

Also filed as: CABALLERO MARIA ISABEL CATALINA

1 granted patent·3 citations·filing 2010–2010

21Inventor score

Technology areasG03F

Files withEHM DIRK HEINRICH1

Top patents by PatentIndex Score

1 record

0172US8477285B2Particle cleaning of optical elements for microlithographyEHM DIRK HEINRICH·Filed 2010·Granted Jul 2, 2013·3 cites·25 claims

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