Inventor · disambiguated record
Mona Nagel
Also filed as: NAGEL MONA
1 granted patent·1 pending application·3 citations·filing 2008–2010
21Inventor score
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2 records- 0172US8477285B2Particle cleaning of optical elements for microlithographyEHM DIRK HEINRICH·Filed 2010·Granted Jul 2, 2013·3 cites·25 claims
- 0237US2010316554A1Method for the manufacture of nanoparticles on a carbon surface and products therefromCT FUR ANGEWANDTE NANOTECHNOLOGIE CAN GMBH·Filed 2008·Application pending·0 cites
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