Inventor · disambiguated record
Muljadi Tantra
Also filed as: TANTRA MULJADI
3 granted patents·279 citations·filing 1998–2004
76Inventor score
Files withCYMER INC3
Top patents by PatentIndex Score
3 records- 0195US6028880AAutomatic fluorine control systemCYMER INC·Filed 1998·Granted Feb 22, 2000·227 cites·19 claims
- 0284US6687562B2Process monitoring system for lithography lasersCYMER INC·Filed 2000·Granted Feb 3, 2004·48 cites·14 claims
- 0348US7203562B2Process monitoring system for lithography lasersCYMER INC·Filed 2004·Granted Apr 10, 2007·4 cites·51 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →