Inventor · disambiguated record
Tung-Jung Chang
Also filed as: CHANG TUNG JUNG
7 granted patents·1 pending application·7 citations·filing 2008–2024
76Inventor score
Top patents by PatentIndex Score
8 records- 0194US11592754B2Advanced load port for photolithography mask inspection toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 28, 2023·2 cites·20 claims
- 0283US12298664B2Advanced load port for photolithography mask inspection toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted May 13, 2025·0 cites·20 claims
- 0383US11054756B2Apparatus and method for cleaning reticle stageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 6, 2021·1 cites·20 claims
- 0480US10627728B2Method for creating vacuum in load lock chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Apr 21, 2020·3 cites·18 claims
- 0578US11921431B2Advanced load port for photolithography mask inspection toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Mar 5, 2024·0 cites·20 claims
- 0667US11162524B2Fittable and releasable fastenerFIVETECH TECHNOLOGY INC·Filed 2019·Granted Nov 2, 2021·1 cites·11 claims
- 0765US10684559B2Apparatus and method for cleaning reticle stageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 16, 2020·0 cites·20 claims
- 0850US2010031583A1Wind driven device for preventing the clogging of a downspoutCHANG TUNG JUNG·Filed 2008·Application pending·0 cites
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