Inventor · disambiguated record
Matthew P. Kirk
Also filed as: KIRK MATTHEW P · KIRK MATTHEW PAUL
2 granted patents·5 pending applications·26 citations·filing 2001–2023
59Inventor score
Top patents by PatentIndex Score
7 records- 0175US7019399B2Copper diffusion barriers made of diamond-like nanocomposits doped with metalsBEKAERT SA NV·Filed 2002·Granted Mar 28, 2006·23 cites·19 claims
- 0251US2025277301A1Coating system and method for semiconductor equipment componentsOERLIKON SURFACE SOLUTIONS AG PFAEFFIKON·Filed 2023·Application pending·0 cites
- 0350US2020017952A1Method to prevent metal contamination by a substrate holderOERLIKON SURFACE SOLUTIONS AG PFAEFFIKON·Filed 2019·Application pending·0 cites
- 0445US2009142599A1Method to prevent metal contamination by a substrate holderBEKAERT SA NV·Filed 2007·Application pending·0 cites
- 0544US2023383396A1Carbon doped metal oxyfluoride (c:m-0-f) layer as protection layer in fluorine plasma etch processesOERLIKON SURFACE SOLUTIONS AG PFAEFFIKON·Filed 2021·Application pending·0 cites
- 0643US2024006216A1Improved plasma resistant coatings for electrostatic chucksOERLIKON SURFACE SOLUTIONS AG PFAEFFIKON·Filed 2021·Application pending·0 cites
- 0742US7300461B2Intravascular stent with expandable coatingBLUE MEDICAL DEVICES B V·Filed 2001·Granted Nov 27, 2007·3 cites·8 claims
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