Inventor · disambiguated record
Do-Yul Yoo
Also filed as: YOO DO-YUL
5 granted patents·3 pending applications·18 citations·filing 2002–2010
74Inventor score
Top patents by PatentIndex Score
8 records- 0172US7804596B2Overlay key, method of forming the overlay key and method of measuring overlay accuracy using the overlay keySAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Sep 28, 2010·6 cites·8 claims
- 0261US7732105B2Photomask with overlay mark and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Jun 8, 2010·2 cites·28 claims
- 0355US7288848B2Overlay mark for measuring and correcting alignment errorsSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Oct 30, 2007·7 cites·34 claims
- 0450US6841338B2Photoresist composition and method of forming a photoresist pattern with a controlled remnant ratioSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Jan 11, 2005·3 cites·55 claims
- 0539US2007063317A1Overlay key, method of forming the overlay key, semiconductor device including the overlay key and method of manufacturing the semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
- 0639US2010315094A1Overlay key, method of forming the overlay key and method of measuring overlay accuracy using the overlay keyYOO DO-YUL·Filed 2010·Application pending·0 cites
- 0738US7236245B2Overlay key with a plurality of crossings and method of measuring overlay accuracy using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jun 26, 2007·0 cites·24 claims
- 0838US2005153539A1Method of forming interconnection lines in a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2004·Application pending·0 cites
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