Inventor · disambiguated record
Robert Gordon Ridgeway
Also filed as: RIDGEWAY ROBERT G · RIDGEWAY ROBERT GORDON
31 granted patents·30 pending applications·562 citations·filing 1993–2025
96Inventor score
Files withVERSUM MAT US LLC45AIR PROD & CHEM8HAAS MARY KATHRYN2HURLEY PATRICK TIMOTHY2ARENA CHANTAL1
Top patents by PatentIndex Score
61 records- 0198US10468244B2Precursors and flowable CVD methods for making low-K films to fill surface featuresVERSUM MAT US LLC·Filed 2017·Granted Nov 5, 2019·388 cites·9 claims
- 0292US6686594B2On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoringAIR PROD & CHEM·Filed 2001·Granted Feb 3, 2004·53 cites·43 claims
- 0391US9922818B2Alkyl-alkoxysilacyclic compoundsAIR PROD & CHEM·Filed 2015·Granted Mar 20, 2018·8 cites·31 claims
- 0490US7581549B2Method for removing carbon-containing residues from a substrateAIR PROD & CHEM·Filed 2005·Granted Sep 1, 2009·18 cites·20 claims
- 0588US10354860B2Method and precursors for manufacturing 3D devicesAIR PROD & CHEM·Filed 2015·Granted Jul 16, 2019·5 cites·34 claims
- 0687US10249489B2Use of silyl bridged alkyl compounds for dense OSG filmsVERSUM MAT US LLC·Filed 2017·Granted Apr 2, 2019·7 cites·25 claims
- 0786US2025188605A1Compositions and Methods Using Same for Deposition of Silicon-Containing FilmVERSUM MAT US LLC·Filed 2024·Application pending·0 cites
- 0885US10106890B2Compositions and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2015·Granted Oct 23, 2018·3 cites·9 claims
- 0982US10319862B2Barrier materials for display devicesAIR PROD & CHEM·Filed 2013·Granted Jun 11, 2019·6 cites·10 claims
- 1079US10395920B2Alkyl-alkoxysilacyclic compoundsVERSUM MAT US LLC·Filed 2018·Granted Aug 27, 2019·2 cites·14 claims
- 1176US2023339986A1Stable alkenyl or alkynyl-containing organosilicon precursor compositionsVERSUM MAT US LLC·Filed 2023·Application pending·0 cites
- 1274US12505999B2Precursors and flowable CVD methods for making low-K films to fill surface featuresVERSUM MAT US LLC·Filed 2022·Granted Dec 23, 2025·0 cites·9 claims
- 1373US11158498B2Silicon compounds and methods for depositing films using sameVERSUM MAT US LLC·Filed 2019·Granted Oct 26, 2021·1 cites·17 claims
- 1473US5661225ADynamic dilution systemAIR PROD & CHEM·Filed 1996·Granted Aug 26, 1997·46 cites·10 claims
- 1573US2024093366A1Compositions and methods for depositing silicon-containing filmsVERSUM MAT US LLC·Filed 2023·Application pending·0 cites
- 1672US11884689B2Alkoxysilacyclic or acyloxysilacyclic compounds and methods for depositing films using sameVERSUM MAT US LLC·Filed 2018·Granted Jan 30, 2024·1 cites·14 claims
- 1772US2025223466A1Compositions comprising silacycloalkanes and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2025·Application pending·0 cites
- 1872US2024182499A1Alkoxysilacyclic or acyloxysilacyclic compounds and methods for depositing films using sameVERSUM MAT US LLC·Filed 2024·Application pending·0 cites
- 1970US8535760B2Additives to silane for thin film silicon photovoltaic devicesHURLEY PATRICK TIMOTHY·Filed 2010·Granted Sep 17, 2013·4 cites·13 claims
- 2069US2025215557A1Compositions and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2025·Application pending·0 cites
- 2169US2024392434A1Compositions and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2024·Application pending·0 cites
- 2267US11713328B2Stable alkenyl or alkynyl-containing organosilicon precursor compositionsVERSUM MAT US LLC·Filed 2019·Granted Aug 1, 2023·0 cites·8 claims
- 2365US12441747B2Silicon compounds and methods for depositing films using sameVERSUM MAT US LLC·Filed 2022·Granted Oct 14, 2025·0 cites·2 claims
- 2465US11270880B2Precursors and flowable CVD methods for making low-k films to fill surface featuresVERSUM MAT US LLC·Filed 2019·Granted Mar 8, 2022·0 cites·6 claims
- 2563US12049695B2Compositions and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2018·Granted Jul 30, 2024·0 cites·12 claims
- 2663US2020048286A1Silicon compounds and methods for depositing films using sameVERSUM MAT US LLC·Filed 2019·Application pending·0 cites
- 2763US2022044928A1Silicon compounds and methods for depositing films using sameVERSUM MAT US LLC·Filed 2021·Application pending·0 cites
- 2861US12264258B2Compositions comprising silacycloalkanes and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2020·Granted Apr 1, 2025·0 cites·24 claims
- 2961US12221692B2Compositions and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2019·Granted Feb 11, 2025·0 cites·12 claims
- 3060US8987039B2Antireflective coatings for photovoltaic applicationsHURLEY PATRICK TIMOTHY·Filed 2008·Granted Mar 24, 2015·1 cites·10 claims
- 3160US2021043446A1Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface FeaturesVERSUM MAT US LLC·Filed 2020·Application pending·0 cites
- 3259US12454753B2Compositions and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2020·Granted Oct 28, 2025·0 cites·7 claims
- 3357US10985013B2Method and precursors for manufacturing 3D devicesVERSUM MAT US LLC·Filed 2019·Granted Apr 20, 2021·0 cites·32 claims
- 3457US2010180913A1Methods for in-situ chamber cleaning process for high volume manufacture of semiconductor materialsARENA CHANTAL·Filed 2008·Application pending·0 cites
- 3556US2022388033A1Precursors for depositing films with high elastic modulusVERSUM MAT US LLC·Filed 2022·Application pending·0 cites
- 3655US11851756B2Methods for depositing silicon-containing filmsVERSUM MAT US LLC·Filed 2018·Granted Dec 26, 2023·0 cites·21 claims
- 3755US11017998B2Precursors and flowable CVD methods for making low-K films to fill surface featuresVERSUM MAT US LLC·Filed 2018·Granted May 25, 2021·0 cites·9 claims
- 3854US5360467AMethod of separating and detecting impurities using a fractional concentration detectorAIR PROD & CHEM·Filed 1993·Granted Nov 1, 1994·18 cites·16 claims
- 3954US2019134663A1Silacyclic Compounds and Methods for Depositing Silicon-Containing Films Using SameVERSUM MAT US LLC·Filed 2018·Application pending·0 cites
- 4052US2024240309A1New Precursors For Depositing Films With High Elastic ModulusVERSUM MAT US LLC·Filed 2022·Application pending·0 cites
- 4152US2020165727A11-Methyl-1-Iso-Propoxy-Silacycloalkanes And Dense Organosilica Films Made TherefromVERSUM MAT US LLC·Filed 2019·Application pending·0 cites
- 4252US2018277360A1Method and Composition for Providing Pore Sealing Layer on Porous Low Dielectric Constant FilmsVERSUM MAT US LLC·Filed 2018·Application pending·0 cites
- 4350US2023386825A1Alkoxydisiloxanes and dense organosilica films made therefromVERSUM MAT US LLC·Filed 2021·Application pending·0 cites
- 4450US2023279030A1Cyclosiloxanes and films made therewithVERSUM MAT US LLC·Filed 2021·Application pending·0 cites
- 4548US2023103933A1New precursors for depositing films with elastic modulusVERSUM MAT US LLC·Filed 2021·Application pending·0 cites
- 4647US11043374B2Silacycloalkane compounds and methods for depositing silicon containing films using sameVERSUM MAT US LLC·Filed 2019·Granted Jun 22, 2021·0 cites·23 claims
- 4747US2022349049A1Compositions and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2020·Application pending·0 cites
- 4847US2019292658A1Compositions and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2016·Application pending·0 cites
- 4946US12312684B2Siloxane compositions and methods for using the compositions to deposit silicon containing filmsVERSUM MAT US LLC·Filed 2019·Granted May 27, 2025·0 cites·10 claims
- 5046US2022301862A1Monoalkoxysilanes and dense organosilica films made therefromVERSUM MAT US LLC·Filed 2020·Application pending·0 cites
Showing the top 50 of 61 patent records by PatentIndex Score.
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