Inventor · disambiguated record
Rick M. Heathwaite
Also filed as: HEATHWAITE RICK M
2 granted patents·122 citations·filing 2001–2001
68Inventor score
Technology areasH10P
Files withS C FLUIDS INC2
Top patents by PatentIndex Score
2 records- 0190US6612317B2Supercritical fluid delivery and recovery system for semiconductor wafer processingS C FLUIDS INC·Filed 2001·Granted Sep 2, 2003·83 cites·20 claims
- 0283US6602349B2Supercritical fluid cleaning process for precision surfacesS C FLUIDS INC·Filed 2001·Granted Aug 5, 2003·39 cites·27 claims
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