Inventor · disambiguated record
David Mount
Also filed as: MOUNT DAVID J · MOUNT SR DAVID J
6 granted patents·6 pending applications·238 citations·filing 1999–2006
85Inventor score
Top patents by PatentIndex Score
12 records- 0190US6612317B2Supercritical fluid delivery and recovery system for semiconductor wafer processingS C FLUIDS INC·Filed 2001·Granted Sep 2, 2003·83 cites·20 claims
- 0287US6624081B2Enhanced etching/smoothing of dielectric surfacesEPION CORP·Filed 2001·Granted Sep 23, 2003·36 cites·8 claims
- 0387US6331227B1Enhanced etching/smoothing of dielectric surfacesEPION CORP·Filed 1999·Granted Dec 18, 2001·77 cites·42 claims
- 0483US6602349B2Supercritical fluid cleaning process for precision surfacesS C FLUIDS INC·Filed 2001·Granted Aug 5, 2003·39 cites·27 claims
- 0545US2007012341A1Supercritical fluid delivery system for semiconductor wafer processingDOUGLAS STEPHEN B·Filed 2006·Application pending·0 cites
- 0639US7108001B2Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefromPOPE KEITH·Filed 2004·Granted Sep 19, 2006·3 cites·17 claims
- 0737US6935352B2Adding energy to a cleaning process fluid for removing photo resist, residues and particles from semiconductor substrates, photo masks, reticles, disks and flat-panel displaysS C FLUIDS INC·Filed 2004·Granted Aug 30, 2005·0 cites·8 claims
- 0837US2004025908A1Supercritical fluid delivery system for semiconductor wafer processingFiled 2003·Application pending·0 cites
- 0935US2004003831A1Supercritical fluid cleaning process for precision surfacesFiled 2003·Application pending·0 cites
- 1035US2004139987A1Method for releasing and drying moveable elements of micro-electronic mechanical structures with organic thin film sacrificial layersFiled 2004·Application pending·0 cites
- 1134US2006029310A1Loadbearing platform with fluid support, isolation and rotationS C FLUIDS INC·Filed 2005·Application pending·0 cites
- 1234US2003116176A1Supercritical fluid processes with megasonicsFiled 2003·Application pending·0 cites
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