Inventor · disambiguated record
Mahadevaiyer Krishnan
Also filed as: KRISHNAN MAHADEVAIYER
55 granted patents·8 pending applications·1,903 citations·filing 1988–2021
99Inventor score
Top patents by PatentIndex Score
63 records- 0199US7045453B2Very low effective dielectric constant interconnect structures and methods for fabricating the sameIBM·Filed 2005·Granted May 16, 2006·221 cites·9 claims
- 0298US6153935ADual etch stop/diffusion barrier for damascene interconnectsIBM·Filed 1999·Granted Nov 28, 2000·376 cites·22 claims
- 0397US6358832B1Method of forming barrier layers for damascene interconnectsIBM·Filed 2000·Granted Mar 19, 2002·119 cites·27 claims
- 0496US7190079B2Selective capping of copper wiringIBM·Filed 2005·Granted Mar 13, 2007·39 cites·9 claims
- 0596US7023093B2Very low effective dielectric constant interconnect Structures and methods for fabricating the sameIBM·Filed 2002·Granted Apr 4, 2006·112 cites·22 claims
- 0696US7008871B2Selective capping of copper wiringIBM·Filed 2003·Granted Mar 7, 2006·105 cites·23 claims
- 0795US6975032B2Copper recess process with application to selective capping and electroless platingIBM·Filed 2002·Granted Dec 13, 2005·85 cites·19 claims
- 0894US6503834B1Process to increase reliability CuBEOL structuresIBM·Filed 2000·Granted Jan 7, 2003·79 cites·16 claims
- 0993US6348076B1Slurry for mechanical polishing (CMP) of metals and use thereofIBM·Filed 1999·Granted Feb 19, 2002·147 cites·26 claims
- 1092US7202764B2Noble metal contacts for micro-electromechanical switchesIBM·Filed 2003·Granted Apr 10, 2007·39 cites·13 claims
- 1192US7064064B2Copper recess process with application to selective capping and electroless platingIBM·Filed 2005·Granted Jun 20, 2006·22 cites·10 claims
- 1291US8889466B2Protective insulating layer and chemical mechanical polishing for polycrystalline thin film solar cellsIBM·Filed 2013·Granted Nov 18, 2014·7 cites·13 claims
- 1391US8513127B2Chemical mechanical planarization processes for fabrication of FinFET devicesCHANG JOSEPHINE B·Filed 2011·Granted Aug 20, 2013·10 cites·20 claims
- 1490US10833301B2Through silicon via energy storage devicesIBM·Filed 2019·Granted Nov 10, 2020·8 cites·19 claims
- 1589US8524606B2Chemical mechanical planarization with overburden maskCHARNS LESLIE·Filed 2011·Granted Sep 3, 2013·11 cites·25 claims
- 1689US6812193B2Slurry for mechanical polishing (CMP) of metals and use thereofIBM·Filed 2002·Granted Nov 2, 2004·53 cites·29 claims
- 1789US6743642B2Bilayer CMP process to improve surface roughness of magnetic stack in MRAM technologyIBM·Filed 2002·Granted Jun 1, 2004·37 cites·10 claims
- 1889US6190237B1pH-buffered slurry and use thereof for polishingIBM·Filed 1997·Granted Feb 20, 2001·107 cites·19 claims
- 1988US11031631B2Fabrication of all-solid-state energy storage devicesIBM·Filed 2019·Granted Jun 8, 2021·2 cites·7 claims
- 2086US8101518B2Method and process for forming a self-aligned silicide contactCABRAL JR CYRIL·Filed 2008·Granted Jan 24, 2012·12 cites·27 claims
- 2184US6597068B2Encapsulated metal structures for semiconductor devices and MIM capacitors including the sameIBM·Filed 2001·Granted Jul 22, 2003·27 cites·6 claims
- 2283US6368953B1Encapsulated metal structures for semiconductor devices and MIM capacitors including the sameIBM·Filed 2000·Granted Apr 9, 2002·27 cites·4 claims
- 2381US7407605B2Manufacturable CoWP metal cap process for copper interconnectsIBM·Filed 2007·Granted Aug 5, 2008·8 cites·3 claims
- 2481US5635253AMethod of replenishing electroless gold plating bathsIBM·Filed 1995·Granted Jun 3, 1997·56 cites·16 claims
- 2580US8889537B2Implantless dopant segregation for silicide contactsCABRAL JR CRYIL·Filed 2010·Granted Nov 18, 2014·9 cites·20 claims
- 2679US8039382B2Method for forming self-aligned metal silicide contactsIBM·Filed 2009·Granted Oct 18, 2011·6 cites·10 claims
- 2777US8865017B2Silicon surface texturing method for reducing surface reflectanceIBM·Filed 2013·Granted Oct 21, 2014·2 cites·9 claims
- 2877US7618891B2Method for forming self-aligned metal silicide contactsIBM·Filed 2006·Granted Nov 17, 2009·6 cites·22 claims
- 2975US12062761B2Fabrication of all-solid-state energy storage devicesIBM·Filed 2021·Granted Aug 13, 2024·0 cites·12 claims
- 3075US8535118B2Multi-spindle chemical mechanical planarization toolCOBB MICHAEL A·Filed 2011·Granted Sep 17, 2013·2 cites·19 claims
- 3173US9646841B1Group III arsenide material smoothing and chemical mechanical planarization processesIBM·Filed 2016·Granted May 9, 2017·2 cites·20 claims
- 3272US8497210B2Shallow trench isolation chemical mechanical planarizationCHARNS LESLIE·Filed 2011·Granted Jul 30, 2013·2 cites·25 claims
- 3372US6114249AChemical mechanical polishing of multiple material substrates and slurry having improved selectivityIBM·Filed 1998·Granted Sep 5, 2000·42 cites·5 claims
- 3471US7581314B2Method of forming noble metal contactsIBM·Filed 2006·Granted Sep 1, 2009·5 cites·7 claims
- 3571US5576099AInductive head lamination with layer of magnetic quenching materialIBM·Filed 1990·Granted Nov 19, 1996·21 cites·10 claims
- 3670US7544610B2Method and process for forming a self-aligned silicide contactIBM·Filed 2004·Granted Jun 9, 2009·14 cites·34 claims
- 3770US6756624B2Encapsulated metal structures for semiconductor devices and MIM capacitors including the sameIBM·Filed 2003·Granted Jun 29, 2004·11 cites·5 claims
- 3868US8110321B2Method of manufacture of damascene reticlePETRARCA KEVIN S·Filed 2007·Granted Feb 7, 2012·2 cites·20 claims
- 3966US8591289B2Multi-spindle chemical mechanical planarization toolCOBB MICHAEL A·Filed 2012·Granted Nov 26, 2013·1 cites·19 claims
- 4064US9741890B2Protective insulating layer and chemical mechanical polishing for polycrystalline thin film solar cellsIBM·Filed 2013·Granted Aug 22, 2017·0 cites·11 claims
- 4160US6361402B1Method for planarizing photoresistIBM·Filed 1999·Granted Mar 26, 2002·26 cites·22 claims
- 4260US5102456ATetra aza ligand systems as complexing agents for electroless deposition of copperIBM·Filed 1990·Granted Apr 7, 1992·21 cites·13 claims
- 4359US8815475B2Reticle carrierIBM·Filed 2013·Granted Aug 26, 2014·0 cites·7 claims
- 4458US2013316623A1Multi-spindle chemical mechanical planarization toolIBM·Filed 2013·Application pending·0 cites
- 4555US10262866B2Indium phosphide smoothing and chemical mechanical planarization processesIBM·Filed 2018·Granted Apr 16, 2019·0 cites·11 claims
- 4655US2010051474A1Method and composition for electro-chemical-mechanical polishingANDRICACOS PANAYOTIS C·Filed 2009·Application pending·0 cites
- 4754US9890300B2Germanium smoothing and chemical mechanical planarization processesIBM·Filed 2017·Granted Feb 13, 2018·0 cites·20 claims
- 4854US2008156636A1Homogeneous Copper Interconnects for BEOLIBM·Filed 2008·Application pending·0 cites
- 4952US8507383B2Fabrication of replacement metal gate devicesANDO TAKASHI·Filed 2011·Granted Aug 13, 2013·0 cites·24 claims
- 5052US8439728B2Reticle carrierPETRARCA KEVIN S·Filed 2011·Granted May 14, 2013·0 cites·13 claims
Showing the top 50 of 63 patent records by PatentIndex Score.
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