Inventor · disambiguated record
Koudai Higashi
Also filed as: HIGASHI KOUDAI
10 granted patents·6 pending applications·7 citations·filing 2010–2025
80Inventor score
Top patents by PatentIndex Score
16 records- 0184US11402313B2Foreign substance detection device and foreign substance detection methodTOKYO ELECTRON LTD·Filed 2017·Granted Aug 2, 2022·2 cites·10 claims
- 0274US11906414B2Foreign substance detection device and foreign substance detection methodTOKYO ELECTRON LTD·Filed 2022·Granted Feb 20, 2024·0 cites·5 claims
- 0371US2024125697A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0469US10049905B2Substrate heat treatment apparatus, substrate heat treatment method, storage medium and heat-treatment-condition detecting apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Aug 14, 2018·2 cites·20 claims
- 0567US11879839B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 23, 2024·0 cites·17 claims
- 0667US8608378B2Temperature measuring apparatusISHIDA HISAKI·Filed 2010·Granted Dec 17, 2013·3 cites·8 claims
- 0764US11340152B2Substrate processing apparatus, substrate processing system, and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted May 24, 2022·0 cites·7 claims
- 0860US2025093276A1Foreign substance detection device and foreign substance detection methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0958US11002656B2Substrate processing apparatus, substrate processing system, and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted May 11, 2021·0 cites·20 claims
- 1050US12431374B2Information acquisition system and information acquisition methodTOKYO ELECTRON LTD·Filed 2022·Granted Sep 30, 2025·0 cites·11 claims
- 1149US2022319893A1Information acquisition system for substrate processing apparatus, arithmetic device, and information acquisition method for substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1248US11048016B2Foreign substance detection device, foreign substance detection method and recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Jun 29, 2021·0 cites·8 claims
- 1346US2025279292A1Condition determination support apparatus and condition determination support methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1444US9953853B2Substrate transport apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Apr 24, 2018·0 cites·9 claims
- 1536US2012275484A1Temperature measuring device, temperature calibrating device and temperature calibrating methodHAYASHI MASATO·Filed 2012·Application pending·0 cites
- 1636US2011233546A1Wafer-type temperature sensor and manufacturing method thereofTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →