Inventor · disambiguated record
Shawn M. Hamilton
Also filed as: HAMILTON SHAWN · HAMILTON SHAWN M
18 granted patents·1 pending application·271 citations·filing 2003–2019
95Inventor score
Top patents by PatentIndex Score
19 records- 0197US10494717B2Anti-transient showerheadLAM RES CORP·Filed 2018·Granted Dec 3, 2019·13 cites·27 claims
- 0297US10023959B2Anti-transient showerheadLAM RES CORP·Filed 2016·Granted Jul 17, 2018·20 cites·26 claims
- 0395US8033769B2Loadlock designs and methods for using sameNOVELLUS SYSTEMS INC·Filed 2007·Granted Oct 11, 2011·42 cites·20 claims
- 0494US7960297B1Load lock design for rapid wafer heatingNOVELLUS SYSTEMS INC·Filed 2006·Granted Jun 14, 2011·44 cites·22 claims
- 0593US9719169B2System and apparatus for flowable deposition in semiconductor fabricationMOHN JONATHAN D·Filed 2011·Granted Aug 1, 2017·31 cites·18 claims
- 0692US9728380B2Dual-plenum showerhead with interleaved plenum sub-volumesNOVELLUS SYSTEMS INC·Filed 2015·Granted Aug 8, 2017·11 cites·20 claims
- 0791US8052419B1Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulationNOVELLUS SYSTEMS INC·Filed 2007·Granted Nov 8, 2011·23 cites·16 claims
- 0888US8273670B1Load lock design for rapid wafer heatingRIVKIN MICHAEL·Filed 2011·Granted Sep 25, 2012·16 cites·18 claims
- 0987US9121097B2Variable showerhead flow by varying internal baffle conductanceMOHN JONATHAN D·Filed 2012·Granted Sep 1, 2015·10 cites·23 claims
- 1084US9002514B2Wafer position correction with a dual, side-by-side wafer transfer robotGENETTI DAMON·Filed 2007·Granted Apr 7, 2015·12 cites·14 claims
- 1184US7300082B2Active edge gripping and effectorASYST TECHNOLOGIES·Filed 2003·Granted Nov 27, 2007·33 cites·17 claims
- 1283US8920162B1Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulationNORDIN MICHAEL·Filed 2011·Granted Dec 30, 2014·9 cites·20 claims
- 1376US10388546B2Apparatus for UV flowable dielectricLAM RES CORP·Filed 2015·Granted Aug 20, 2019·2 cites·9 claims
- 1475US8491248B2Loadlock designs and methods for using sameGAGE CHRIS·Filed 2011·Granted Jul 23, 2013·3 cites·12 claims
- 1573US11270896B2Apparatus for UV flowable dielectricLAM RES CORP·Filed 2019·Granted Mar 8, 2022·1 cites·12 claims
- 1664US9496159B2Wafer position correction with a dual, side-by-side wafer transfer robotNOVELLUS SYSTEMS INC·Filed 2015·Granted Nov 15, 2016·1 cites·14 claims
- 1758US10107490B2Configurable liquid precursor vaporizerLAM RES CORP·Filed 2014·Granted Oct 23, 2018·0 cites·18 claims
- 1847US9863041B2Internally heated porous filter for defect reduction with liquid or solid precursorsLAM RES CORP·Filed 2015·Granted Jan 9, 2018·0 cites·17 claims
- 1940US2014049162A1Defect reduction in plasma processingTHOMAS GEORGE·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →