Inventor · disambiguated record
Ryo Nawata
Also filed as: NAWATA RYO
18 granted patents·10 pending applications·64 citations·filing 2004–2025
91Inventor score
Top patents by PatentIndex Score
28 records- 0193US9665108B2Vibration reduction apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2015·Granted May 30, 2017·7 cites·19 claims
- 0286US11584063B2Imprint method, imprint apparatus, and article manufacturing methodCANON KK·Filed 2019·Granted Feb 21, 2023·4 cites·15 claims
- 0386US7133115B2Positioning device, exposure apparatus using the positioning device, and device production methodCANON KK·Filed 2004·Granted Nov 7, 2006·26 cites·27 claims
- 0478US9052614B2Vibration control apparatus, lithography apparatus, and method of manufacturing articleNAWATA RYO·Filed 2011·Granted Jun 9, 2015·6 cites·18 claims
- 0575US7221463B2Positioning apparatus, exposure apparatus, and method for producing deviceCANON KK·Filed 2004·Granted May 22, 2007·13 cites·55 claims
- 0674US2024036531A1Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control methodCANON KK·Filed 2023·Application pending·0 cites
- 0768US11815861B2Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control methodCANON KK·Filed 2021·Granted Nov 14, 2023·0 cites·12 claims
- 0868US7643150B2Optical apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2007·Granted Jan 5, 2010·2 cites·10 claims
- 0968US2025073963A1Imprint apparatus, imprint method, information processing apparatus and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 1065US12147164B2Motion control apparatus, lithography apparatus, planarization apparatus, processing apparatus, and article manufacturing methodCANON KK·Filed 2022·Granted Nov 19, 2024·0 cites·24 claims
- 1165US7821726B2Optical element positioning apparatus, projection optical system and exposure apparatusCANON KK·Filed 2008·Granted Oct 26, 2010·3 cites·5 claims
- 1265US7733462B2Exposure apparatus and exposure methodCANON KK·Filed 2006·Granted Jun 8, 2010·2 cites·9 claims
- 1364US7948695B2Optical element positioning apparatus, projection optical system and exposure apparatusCANON KK·Filed 2010·Granted May 24, 2011·1 cites·5 claims
- 1463US2024310809A1Control device, control method, storage medium, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 1558US2025357139A1Planarization apparatus, planarization method, and article manufacturing methodCANON KK·Filed 2025·Application pending·0 cites
- 1655US2023334331A1Management apparatus, processing system, management method, and article manufacturing methodCANON KK·Filed 2023·Application pending·0 cites
- 1753US9671704B2Vibration reduction apparatus, lithography apparatus and method of manufacturing articleCANON KK·Filed 2014·Granted Jun 6, 2017·0 cites·19 claims
- 1852US12246482B2Control apparatus, imprint apparatus, and method of manufacturing articleCANON KK·Filed 2021·Granted Mar 11, 2025·0 cites·19 claims
- 1952US11498260B2Imprint method and method for manufacturing articleCANON KK·Filed 2020·Granted Nov 15, 2022·0 cites·21 claims
- 2048US11714352B2Imprinting apparatus, imprinting method, method for producing article, substrate, and moldCANON KK·Filed 2020·Granted Aug 1, 2023·0 cites·17 claims
- 2148US2008068603A1Anti-vibration apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2007·Application pending·0 cites
- 2247US10209633B2Vibration control apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2016·Granted Feb 19, 2019·0 cites·22 claims
- 2342US9599185B2Vibration control apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2015·Granted Mar 21, 2017·0 cites·10 claims
- 2442US7589911B2Technique for positioning optical system elementCANON KK·Filed 2004·Granted Sep 15, 2009·0 cites·12 claims
- 2542US2010165313A1Mirror substrate, mirror, exposure apparatus, device manufacturing method, and mirror manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 2641US2013147939A1Image acquisition apparatus and method for adjusting image acquisition apparatusCANON KK·Filed 2012·Application pending·0 cites
- 2736US2012314050A1Imaging apparatus and control method thereforNAWATA RYO·Filed 2012·Application pending·0 cites
- 2835US2012045723A1Vibration isolation device, exposure apparatus, and device manufacturing method using sameNAWATA RYO·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →